How to model and simulate microgyroscope systems

Foundations of Microelectromechanical System Synthesis

“…Schematic examples of a crab-leg resonator and an O-shaped spring using the basis elements are shown in Figure 13. The use of circuit element libraries for nodal analysis of micromachined systems [64,65,66] and for microgyroscope simulation [58,67] are also being simultaneously pursued.…”

A fault simulation methodology for MEMS

“…The natural frequencies of the beams are simulated by splitting the beam into more than one element. In [2] a microgyroscope system is modelled. Finite element simulations are used to derive descriptions of components for which it is difficult to find an analytical solution.…”

“…The methodology is based on preliminary work [1] and builds on component level modelling used in design and test studies at both Robert Bosch GmbH [2,3] and Carnegie Mellon University [4]. Methods of modelling both micromechanical structures and interface electronics in closed loop configuration are discussed with concepts illustrated on a silicon resonant pressure sensor.…”

Orientation tracking for humans and robots using inertial sensors

“…Micromachined replacements for the angular rate sensors are also being investigated. Possible candidates include those developed by Bosch GmbH for skid control in Damiler-Benz automobiles [23].…”

“…In order to understand how an erroneous approaches over time consider the following static sensor scenario. Suppose the sensor is mounted in a static fixture so that all euler angles are zero and thus (22) Assume that the unit quaternion is incorrect and is represented by (23) where all are small quantities. In the absence of motion and noise, and both n 1 and n 2 equal zero.…”