2014
DOI: 10.1016/j.snb.2014.02.108
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How to engineer superhydrophobic micromechanical sensors preserving mass resolution

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Cited by 7 publications
(7 citation statements)
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“…Analytical devices, called sensors, consist of a transducer and recognition elements to capture an analyte for their structure evaluation and they act by modifying the responses into the signals. The sensors can be classified as optical [73,74,75], electrochemical [76,77,78], piezoelectric [79,80,81], magnetic [82,83,84], micromechanical [85,86,87] and thermal [88,89,90] sensors.…”
Section: Molecularly Imprinted Polymer Based Sensorsmentioning
confidence: 99%
“…Analytical devices, called sensors, consist of a transducer and recognition elements to capture an analyte for their structure evaluation and they act by modifying the responses into the signals. The sensors can be classified as optical [73,74,75], electrochemical [76,77,78], piezoelectric [79,80,81], magnetic [82,83,84], micromechanical [85,86,87] and thermal [88,89,90] sensors.…”
Section: Molecularly Imprinted Polymer Based Sensorsmentioning
confidence: 99%
“…Details of the fabrication procedure are reported elsewhere (Borin et al 2014). Briefly, we started from a well cleaned Si(100) wafer.…”
Section: 1pillars Fabricationmentioning
confidence: 99%
“…In order to achieve permanent superhydrophobic properties (Cassie-Baxter state), pillar walls were coated with a hydrophobic layer as discussed in detail in (Borin et al 2014). In particular we formed an alkanosilane coating through octadecyltrichlorosilane (OTS) deposition from a 1mM solution in dry toluene for 1h.…”
Section: Pillars Hydrophobizationmentioning
confidence: 99%
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“…There is a large and emerging demand for the use of Micro Electro Mechanical Systems (MEMS) working in aqueous environments, especially for biosensors and biotechnology applications. Applications span from general purpose devices, like Atomic Force Microscopy (AFM) probes used in liquid environment [1] to highly specialized devices exploiting horizontal cantilevers or vertical micropillars [2][3] used for the detection of the biomolecule of interest in the analyte solution [4]. In all these cases, the devices are obtained from silicon or silicon derivatives (e.g.…”
Section: Introductionmentioning
confidence: 99%