Hotspot analysis and empirical correction through mask and wafer technology harmonization

Choi, Yohan; Chou, William; Cheng, Jeffrey; Twu, C. H.; Lee, Adder; Chao, Chih Hsuan; Chou, Hsin Fu; Chen, Sweet; Cheng, James; Lu, Colbert; Tzeng, Josh; Cheng, Jackie; Lee, Hong Jen; Green, Michael; Ramadan, Mohamed; Ham, Young; Progler, Christopher J.

doi:10.1117/12.2501427

Photomask Technology 2018 2018

DOI: 10.1117/12.2501427

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Hotspot analysis and empirical correction through mask and wafer technology harmonization

Yohan Choi

William Chou

Jeffrey Cheng

et al.

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Hotspot analysis and empirical correction through mask and wafer technology harmonization

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