Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500/spl deg/C

Barrettino, Diego; Gräf, M.; Song, Wenjing; Kirstein, K.-U.; Hierlemann, Andreas; Baltes, H.

doi:10.1109/jssc.2004.829929

Cited by 62 publications

(29 citation statements)

References 15 publications

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“…The system is also adequate for CH 4 -sensing using SnO 2 -thick films, where operating temperatures of up to 350 • C are regularly applied. The monolithic sensor system cannot only be used for sensor applications but also for material processing and the determination of characteristic thermal properties such as the melting point of a material [22], in particular, when an extended temperature range is desirable. The presented system was designed for temperatures up to 500 • C, but it seems possible to generate even higher temperatures, which will be subject to further investigations.…”

Section: Resultsmentioning

confidence: 99%

CMOS microhotplate sensor system for operating temperatures up to 500°C

Gräf

Barrettino

Kirstein

et al. 2006

Sensors and Actuators B: Chemical

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Section: Resultsmentioning

confidence: 99%

CMOS microhotplate sensor system for operating temperatures up to 500°C

Gräf

Barrettino

Kirstein

et al. 2006

Sensors and Actuators B: Chemical

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“…Micro gas sensors with micro-platforms, which consist of micro heaters and sensing electrodes on the membranes, have been actively researched, due to the possibility to miniaturize sensors and reduce power consumptions [1][2][3][4]. Micro heaters are necessary for elevated temperatures to operate micro gas sensors [5], because most of gas sensors need thermal energy to react gases [6,7].…”

Section: Introductionmentioning

confidence: 99%

Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor

Kang

Park

et al. 2017

Micro and Nano Syst Lett

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Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T 2 = 6.466R 1 -642.8, where T 2 = temperature of the Pt micro heater and R 1 = the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25 ppm CO and 1 ppm HCHO gases were characterized.

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“…Such single-chip solutions could include both analog and digital circuits and implement the sensor interface and the elaboration system as well [1][2][3][4][5][6]. For these reasons, the design, through an electronic topology, of a first analog front-end, suitable for different kinds of gas sensors, is one of the recent targets [7][8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%