Holographic formation of compound photonic crystal and nano-antenna templates through laser interference

Abstract

This paper presents a holographic formation of compound photonic crystal and nano-antenna templates through a reflective optical element based laser interference. The reflective optical element consists of four Si facets where a circularly polarized single beam impinges at the Brewster angle and is reflected into four linearly s-polarized beams for the inference lithography. By tuning the phase delay in one of the interfering beams, dual-lattice photonic crystal, and nano-antenna templates are fabricated and compared with theoretic simulation. The design conditions for the nano-antenna formation are discussed.

Spatial light modulator based holographic fabrication of 3D spatially varying photonic crystal templates

“…22 By varying the number of beams and the polarization, intensity, phase, and angle of interference of those beams, different structures can be made, 18,19 but many bulk optical elements are needed to modify these parameters simultaneously in traditional holography setups. 11,12 Single beam and single optical element setups [13][14][15][16][17][23][24] can now holographically fabricate 2D and 3D photonic crystal templates with ease, and a single diffractive element setup has been shown to simultaneously fabricate photonic crystal templates with line defects. 25 The pattern integrated interference lithography technique effectively simultaneously fabricates photonic crystal templates with defects, 26 and is capable of embedding microcavity defects within a 3D photonic structure.…”

Holographic fabrication of photonic crystal templates using spatial-light-modulator-based phase mask method

“…18,19 However, the optical setup to change these parameters simultaneously can become quite complicated when bulk optical elements such as beam splitters, mirrors, and polarizers are used. 11,12 In recent works, the use of single diffractive [13][14][15][16] or reflective 17,[23][24] optical elements simplified the optical setup needed for successful holographic fabrication of 3D photonic crystal templates, and also improved optical stability. Single reflective optical elements were used to fabricate woodpile-type 23 and compound photonic crystal templates 24 .…”

“…11,12 In recent works, the use of single diffractive [13][14][15][16] or reflective 17,[23][24] optical elements simplified the optical setup needed for successful holographic fabrication of 3D photonic crystal templates, and also improved optical stability. Single reflective optical elements were used to fabricate woodpile-type 23 and compound photonic crystal templates 24 . Spatial light modulators have been recently shown to be capable of producing intensity profiles necessary for the holographic fabrication of periodic and quasiperiodic photonic lattice structures using computer-generated phase holograms.…”

Holographic fabrication of nanoantenna templates through a single reflective optical element

“…This method has already been applied for the fabrication of nanoantennas using four-beam interference [12][13][14]. For the nanoantennas, the smaller the nanogap size, the stronger the local field enhancement.…”