by modifying the deposition techniques. Currently, solution-processed and vaporassisted routes dominate the fabrication approaches for perovskite absorber layer.Nowadays, solution-processed spincoating method is still the major approach to synthesize perovskite fi lm for high effi ciency PSCs. [4][5][6] Various deposition routes have been developed to prevent the unwanted phenomena such as fast crystallization rate and incomplete coverage which resulted in poor quality perovskite fi lm. For instance, solvent engineering using toluene, [ 6 ] diethyl ether, [ 7 ] or other solvents [ 8 ] was conducted to produce shiny mirror-like perovskite fi lm with effi cient perovskite solar cells and excellent reproducibility. Despite the extremely high device effi ciency achieved by solution-processed approach, fabrication of large-area perovskite module for commercial purpose remained challenging with spin-coating process.Vapor-based deposition technique for perovskite fi lm preparation is considered as a promising approach which not only prevents fast reaction rate but also benefi ts for large-scale perovskite module fabrication. With regard to the reduction of the reaction rate for pin-hole-free high-quality absorber layer, several works applying various vapor-assisted deposition techniques for perovskite (APbX 3 , A = CH 3 NH 3 or CH(NH 2 ) 2 , X = Cl, Br, or I) layer fabrication have been reported recently. In 2013, a dualsource coevaporation deposition of organic CH 3 NH 3 I (MAI) and inorganic PbCl 2 in high vacuum chamber successfully created a uniform fl at CH 3 NH 3 PbI 3-x Cl x layer. A remarkable PCE of 15% [ 8 ] incorporating with spiro-MeOTAD has been achieved. The inverted planar perovskite solar cells incorporating with organic hole blocking layer have also been reported applying dual-source evaporation route using PbI 2 (250 °C) and MAI (70 °C) as evaporation sources and the effi ciency of solar cells was 12%.[ 9 ] The efficiency was then further optimized up to 14.8% [ 10 ] (0.065 cm 2 ) for small-area device and 10% for larger-area device (≈1 cm 2 ). Some similar works using dual-source coevaporation method have been reported. [ 11,12 ] Since then a modifi ed layer-by-layer sequential vacuum evaporation method, which thermally sublimated PbCl 2 and MAI one after another onto the PSS:PEDOT/ITO substrate, was fi rst applied to form CH 3 NH 3 PbI 3-x Cl x absorber layer. The photovoltaic performance of solar cells reached 15.4%. [ 13 ] Similar work was reported by introducing a graphite vessel rather than high vacuum chamber to sequentially evaporate PbI 2 /MAI and obtained a best PSCs of 13.7%. [ 14 ] However, owing to their material properties for MAI and PbCl 2 , controlling the codeposition Vapor-based deposition technique is considered as a promising approach for preparing a high-quality and uniform perovskite thin fi lm. With evolution from coevaporation deposition to a low-pressure vapor-assisted solution process, both energy budget and reaction yield for perovskite fi lm fabrications are improved. In th...