HIV Counselling and Testing Measure

Weihs, Martin; Meyer-Weitz, Anna; Baasner-Weihs, Friederike

doi:10.1037/t67271-000

Cited by 1 publication

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“…The deformation analysis of a SCSi microstructure for a given mechanical load or the calculation of its resonance frequencies does not present any particular problem. In fact, the constitutive behaviour of micromachined SCSi has been characterized in a number of micromechanical tests aiming at determining its elastic constants [1][2][3][4][5][6][7]. On the other hand, failure criteria and viable calculation procedures for the mechanical integrity analysis of SCSi microstructures are still missing, despite the availability of a certain amount of strength data [3, 5,6,[8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Fracture behaviour of single crystal silicon microstructures

Meroni

Mazza

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003.

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The fracture behaviour of single crystal silicon (SCSi) microstructures is analysed based on micromechanical torsional and tensile experiments. The uniaxial testpieces are characterised by the presence of sharp notches at the gauge length extremities. The critical loading conditions are reproduced in a finite element model in order to identify the analogies of the failure conditions in tension and torsion. The stress field in the vicinity of the notch tip (were cracks originate) is analyzed, and fracture mechanics parameters are determined. In the finite element model a crack, reproducing the failure process observed in the experiments, is included. The crack area is incrementally increased and the energy release rate for the critical loading conditions in tension and torsion is calculated. Based on these results a failure criterion is formulated along with a procedure for the mechanical integrity analysis of SCSi microstructures of arbitrary shape and loading conditions.

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Section: Introductionmentioning

confidence: 99%

Fracture behaviour of single crystal silicon microstructures

Meroni

Mazza

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003.

View full text Add to dashboard Cite

show abstract

HIV Counselling and Testing Measure

Cited by 1 publication

References 0 publications

Fracture behaviour of single crystal silicon microstructures

Fracture behaviour of single crystal silicon microstructures

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