Highly Volatile Magnesium Complexes with the Aminodiboranate Anion, a New Chelating Borohydride. Synthesis and Characterization of Mg(H3BNMe2BH3)2 and Related Compounds

Kim, Do Young; Girolami, Gregory S.

doi:10.1021/ic1000667

Cited by 31 publications

(46 citation statements)

References 48 publications

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“…2 However, the key to the successful growth of thin films using these techniques is the availability of highly volatile and thermally stable precursors. Various organometallic and coordination compounds of magnesium, including alkyls, 3 alkoxides, 4 carboxylates, 5 cyclopentadienyls, 6 chelating borohydrides 7 and β-diketonates, 8 have been used as magnesium oxide sources. Among these, the widely used β-diketonate complexes offer high thermal stability, volatility, and clean decomposition pathways.…”

Section: Introductionmentioning

confidence: 99%

New heteroleptic magnesium complexes for MgO thin film application

et al. 2015

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Novel heteroleptic magnesium complexes, [Mg(dmamp)(acac)]2 (), [Mg(dmamp)(tmhd)]2 (), [Mg(dmamp)(tfac)]2 (), and [Mg(dmamp)(hfac)]2 (), were successfully synthesized using dmamp and β-diketonate as ligands. The thermogravimetric analyses and volatile studies of the complexes showed that the complexes and display high volatility and thermal stability. The single crystal X-ray study of the complexes reveals that both the complexes and were crystalized in the triclinic space group and as dimers, where magnesium atoms are in the pentacoordinate state with distorted trigonal bipyramidal geometry.

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Section: Introductionmentioning

confidence: 99%

New heteroleptic magnesium complexes for MgO thin film application

et al. 2015

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“…The Mg(DMADB) 2 precursor is prepared in the laboratory of G.S.G. 38 Deionized water is used as the coreactant. Precursor and water are kept in separate Pyrex containers adapted to stainless steel fittings, and fed into chamber through needle valves and separate 0.4 cm i.d.…”

Section: Methodsmentioning

confidence: 99%

Superconformal chemical vapor deposition of thin films in deep features

Wang

Chang

Codding

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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The authors report a new and potentially widely applicable method for the chemical vapor deposition (CVD) of films with a superconformal thickness profile in recessed features, i.e., the rate of growth increases with depth away from the opening. Provided that the aspect ratio of the feature is not too large, deposition initially affords a “V” shaped profile; continued deposition eventually fills the feature without leaving a void or seam of low-density material along the centerline. Superconformal deposition occurs under the following set of conditions: (1) growth involves two coreactants; (2) the deposition rate depends directly on the surface concentrations of both coreactants; (3) the molecular diffusivities of the coreactants are different; and (4) the partial pressures of the coreactants are chosen such that the surface coverage of the more rapidly diffusing coreactant is relatively small, and therefore rate-limiting, near the opening. The latter condition can be fulfilled if the more slowly diffusing coreactant is employed in excess or has an intrinsically higher sticking coefficient. Under these circumstances, the deposition rate will increase deeper in the feature for the following reason: the pressure of the slowly diffusing coreactant necessarily drops more quickly with depth than that of the rapidly diffusing coreactant, which increases the fractional surface coverage of the fast-diffusing coreactant and with it the growth rate. At sufficiently large depths, eventually the surface concentration of the more slowly diffusing coreactant will become rate limiting and the growth rate will begin to fall; to obtain superconformal growth, therefore, conditions must be chosen so that the growth rate does not surpass its peak value. As a specific example of how this new approach can be implemented, MgO is deposited at 220 °C using the aminodiboranate precursor Mg(DMADB)2 and H2O. Under properly chosen conditions, the growth rate increases from 1.0 nm/min at the trench opening to 1.8 nm/min at a depth/width ratio of 18. The authors propose a kinetic model that quantitatively explains these observations and, more generally, predicts the film profile as a function of the partial pressures of the coreactants in the gas feed, the molecular diffusivities, and the aspect ratio of the feature. An additional benefit of the model is that it can be used to predict conditions under which perfectly conformal CVD depositions will result. The present method should enable the fabrication of nanoscale devices in which high aspect ratio recessed features need to be completely filled. The method is intrinsic in nature and does not require special surface preparation, the use of a catalyst, or cycles of deposition and etching.

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“…Mg still prefers the less bulky Cp’ rings, while Ca includes some bulky fluorenyl ligands. The monomeric and solvated Mg‐pyrrolide, [82e] amidinates, [88] and the aminodiboronate [89] have κ 2 ‐coordination from X, although the pyrrolide is potentially tridentate. The Mg‐aminoethylamide [82e] and pyrazolide [90] and the Sr‐ and Ba‐guanidinates [91] are solvent‐free dimers where X is bridging in different ways.…”

Section: Cp’ (Cpr/indr/flur) Complexesmentioning

confidence: 99%

Cyclopentadienyl Complexes of the Alkaline Earths in Light of the Periodic Trends

Baguli

Mondal

Mandal

et al. 2021

Chemistry An Asian Journal

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The electron‐rich cyclopentadienyl and the analogous indenyl and fluorenyl ligands (collectively denoted here as Cp’) have been impactful in stabilizing electron‐deficient metal centers including the highly electropositive alkaline earths. Being in the s‐block, the group 2 metals follow a major periodic variation in their atomic and ionic properties which is reflected in those Cp’ compounds. This article presents an overview of this class of compounds for all the five metals from beryllium to barium (radium is excluded for its radioactivity), highlighting their systematic variation.

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Highly Volatile Magnesium Complexes with the Aminodiboranate Anion, a New Chelating Borohydride. Synthesis and Characterization of Mg(H₃BNMe₂BH₃)₂ and Related Compounds

Cited by 31 publications

References 48 publications

New heteroleptic magnesium complexes for MgO thin film application

New heteroleptic magnesium complexes for MgO thin film application

Superconformal chemical vapor deposition of thin films in deep features

Cyclopentadienyl Complexes of the Alkaline Earths in Light of the Periodic Trends

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