2015
DOI: 10.1364/oe.23.027683
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Highly spectrum-selective ultraviolet photodetector based on p-NiO/n-IGZO thin film heterojunction structure

Abstract: Ultraviolet photodetector with p-n heterojunction is fabricated by magnetron sputtering deposition of n-type indium gallium zinc oxide (n-IGZO) and p-type nickel oxide (p-NiO) thin films on ITO glass. The performance of the photodetector is largely affected by the conductivity of the p-NiO thin film, which can be controlled by varying the oxygen partial pressure during the deposition of the p-NiO thin film. A highly spectrum-selective ultraviolet photodetector has been achieved with the p-NiO layer with a high… Show more

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Cited by 39 publications
(20 citation statements)
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“…The Tauc plot for a 30 nm thick layer (see Figure b) confirms the direct band gap as the exponential factor k in ( αhν ) k is equal to k = 2. The corresponding band‐gap energy of the NiO x is around 3.7 eV, which is in good agreement with values from the literature . Thus, based on XRD and the band‐gap energy, the formation of a relatively pure nickel oxide matrix close to its stoichiometric composition can be concluded.…”
Section: Resultssupporting
confidence: 88%
“…The Tauc plot for a 30 nm thick layer (see Figure b) confirms the direct band gap as the exponential factor k in ( αhν ) k is equal to k = 2. The corresponding band‐gap energy of the NiO x is around 3.7 eV, which is in good agreement with values from the literature . Thus, based on XRD and the band‐gap energy, the formation of a relatively pure nickel oxide matrix close to its stoichiometric composition can be concluded.…”
Section: Resultssupporting
confidence: 88%
“…Finally, the p- and n-type character of NiO x films was demonstrated by fabricating a diode. Previously, pn heterojunctions have been demonstrated by using NiO as the p-type material and ZnO, IGZO, or Ga 2 O 3 as the n-type material. ,, Also, just a few reports of NiO homojunctions exist. For example, Tyagi et al fabricated a NiO-based homojunction by sputtering and achieved two orders of rectification; however, the diodes were fabricated at temperatures as high as 500 °C and have very high electron concentration (∼10 20 cm –3 ) for the n-type layer, resulting in field-dependent leakage current.…”
Section: Resultsmentioning
confidence: 99%
“…Also, a-IGZO is n-type semiconductor has distinct advantages over other semiconductors such as its usability in room temperature processes, good stability, high transparency in the visible region (380-750 nm), large energy band gap of 3.5 eV (Li et al 2019), the low cost and environmental friendly composition (Moreira et al 2019). IGZO thin film transistors detect UV light and are generally used in the application of UV detectors (Li et al 2015). Thin-film transistors (TFTs) manufactured by polycrystalline Silicon (Si) and amorphous Si, which are the basic materials of existing flat panel displays and over glass systems.…”
Section: Introductionmentioning
confidence: 99%
“…Fortunately, oxide-based TFTs have high mobility and can be produced at low substrate temperatures. Due to the commonness of Si semiconductor manufacturing processes, it is very significant to examine the IGZO/p-Si hetero junction diode structures, where IGZO semiconductor can be a viable nominee to channel layer in a Si-based electronic device (Li et al 2015, Xie et al 2012. Band alignment between a-IGZO and Si semiconductors helps to foresee the electronic structures such as electron transport at the interface, band bending, built potential and performances of hetero junction devices (Chen et al 2015).…”
Section: Introductionmentioning
confidence: 99%