2022
DOI: 10.1021/acsami.2c04105
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Highly Sensitive Hydrogen Sensor Based on an Optical Driven Nanofilm Resonator

Abstract: Nanofilm resonators combine ultracompact and highly mechanically sensitive properties, making them intriguing devices for sensing applications. For trace hydrogen detection, we demonstrate an optomechanical nanofilm resonator by employing a Pd- and Au-decorated graphene onto a fiber end facet. The Pd layer is a sensitive layer for selective absorption of hydrogen. Hydrogen sensing is achieved by all-optical measuring of the resonant frequencies shift of the optomechanical nanofilm resonator induced by hydrogen… Show more

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Cited by 8 publications
(2 citation statements)
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“…Due to its exceptional mechanical properties and ductility, graphene is the ideal material to be used as a bearing surface for cantilevers. [48][49][50] Fig. 2(a) presents the SEM image of the graphene film suspended on the capillary end face, from which we can ensure the smooth and flat graphene film has been successfully transferred to the capillary surface.…”
Section: Sensor Fabrication and Characterizationmentioning
confidence: 99%
“…Due to its exceptional mechanical properties and ductility, graphene is the ideal material to be used as a bearing surface for cantilevers. [48][49][50] Fig. 2(a) presents the SEM image of the graphene film suspended on the capillary end face, from which we can ensure the smooth and flat graphene film has been successfully transferred to the capillary surface.…”
Section: Sensor Fabrication and Characterizationmentioning
confidence: 99%
“…For example, after absorbing hydrogen molecules, the volume of Pd film expands. This feature can be used to create strain-sensitive optical fiber hydrogen sensors [12] or microoptomechanical resonator-based hydrogen sensors [13], but the embrittlement effect is still a pressing issue for the stability and sensitivity of Pd-based hydrogen sensors [3,[14][15][16]. WO 3 is another candidate for hydrogen-sensing thin-film owing to its optical properties, such as the gasochromic effect and the refractive index effect [17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%