Highly sensitive hydrogen detection using curvature change of wireless-electrodeless quartz resonators

Zhou, Lianjie; Nakamura, Nobutomo; Nagakubo, Akira; Ogi, Hirotsugu

doi:10.1063/1.5126135

Cited by 11 publications

(21 citation statements)

References 51 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Other critical thickness, such as 10 µm and 20 µm have also been reported [28,29]. In our previous study, the evaluation of reaction constant performed on a 200 nm thick palladium film yielded an activation energy of 0.372 eV [20], indicating that the surface-to-subsurface transition is the rate-limiting step in this thickness.…”

Section: Introductionmentioning

confidence: 67%

“…When hydrogen is adsorbed in the palladium film, it expands and causes bending deformation of the resonator. We previously found that the increase in the resonator curvature results in the decrease in the resonance frequency for an AT-cut quartz plate [20]. Therefore, the frequency decrease during exposure to hydrogen gas indicates the progress of the absorption reaction of hydrogen in the palladium film.…”

Section: Hydrogen Absorption Kinetics On Plasma Treated Palladium Filmmentioning

confidence: 95%

“…A sensitive hydrogen-gas sensor that works at room temperature without temperature controlling is then preferable, especially for long term monitoring applications. In our previous study, we demonstrated that a quartz resonator coated with a palladium thin film can be used as a highly sensitive hydrogen-gas sensor [20,21]. The absorption of hydrogen leads to the palladium-film expansion and then the geometry change of the quartz resonator, resulting in the resonant-frequency change.…”

Section: Introductionmentioning

confidence: 99%

“…We intend to detect hydrogen gas through the frequency change caused by the resonator bending induced by hydrogen absorption, because this mechanism is more dominant than the mass loading effect [20]. Therefore, free deformation of the resonator should be realized, but existing quartz-crystalmicrobalance sensors fail to achieve this, because quartz resonators there are tightly fixed.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

MEMS hydrogen gas sensor with wireless quartz crystal resonator

Zhou¹,

Kato²,

Nakamura³

et al. 2021

Sensors and Actuators B: Chemical

Self Cite

View full text Add to dashboard Cite

A highly sensitive hydrogen-gas sensor fabricated using MEMS technology is presented. The sensor chip consists of glass substrates, silicon substrate, and an AT-cut quartz crystal resonator, which is embedded in the microchannel constructed on the substrates. The quartz resonator has a fundamental resonant frequency of 165 MHz and a 200 nm palladium film deposited on its single surface as the hydrogen-gas sensing material. The MEMS hydrogen-gas sensor operates in a wireless manner by exciting and detecting the resonator vibration using the non-contacting antennas. The curvature induced resonant frequency change of the resonator plate caused by the expansion of the palladium film is used for the detection of the hydrogen gas. We succeeded in improving the hydrogen absorption rate and then the sensitivity for the hydrogen-gas detection by applying the air-plasma treatment method, and clarified the role of palladium oxide in lowering the energy barrier for the hydrogen-atom migration from surface to subsurface with the X-ray photoelectron spectroscopy. Thus sensitivity enhanced MEMS hydrogen-gas sensor exhibits a detection limit of 10 ppm or less at room temperature.

show abstract

Section: Introductionmentioning

confidence: 67%

Section: Hydrogen Absorption Kinetics On Plasma Treated Palladium Filmmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

MEMS hydrogen gas sensor with wireless quartz crystal resonator

Zhou¹,

Kato²,

Nakamura³

et al. 2021

Sensors and Actuators B: Chemical

Self Cite

View full text Add to dashboard Cite

show abstract

“…In contrast, the palladium nanotube arrays 20 show the resistance change of 247% at 100 ppm, which is larger than the value obtained in the present study, but the response time is 400 s, which is longer than the value observed in the present study. Using the metal oxide semiconductor field-effect transistor (MOSFET), 23 heterojunction field-effect transistor (HFET), 22 surface acoustic wave, 27 and quartz oscillator, 28 in addition to the above sensors, hydrogen gas at 100 ppm and lower concentrations is detectable. The MOSFET and HFET sensors are generally operated at elevated temperatures to accelerate the response.…”

Section: Resultsmentioning

confidence: 99%

Hydrogen-gas sensing at low concentrations using extremely narrow gap palladium nanoclusters prepared by resistive spectroscopy

Nakamura

Ueno

Ogi

2019

Journal of Applied Physics

Self Cite

View full text Add to dashboard Cite

Isolated palladium nanostructures expand when they are exposed to hydrogen gas, and the gaps between them become narrower, thereby decreasing the electrical resistance. This behavior is applicable for the hydrogen-gas sensing, and several types of nanogap structures have been developed. However, the resistance change is significantly small at a low hydrogen-gas concentration because of insignificant lattice expansion. In the present study, this problem is solved by using the palladium nanoclusters with extremely narrow gaps, which is achieved by our original method, resistive spectroscopy, and hydrogen-induced structural stabilization. The nanoclusters are fabricated by interrupting deposition just before forming the continuous film, in which palladium clusters are nearly touching each other, and exposing them to hydrogen gas. In conventional studies using nanoclusters, hydrogen gas is detected through a decrease in the surface electric resistance caused by gap narrowing/closing. However, in this study, we observe an increase in the resistance when the gap distance between the cluster is extremely small, which is attributed to the restriction of electron tunneling between the palladium nanoclusters because of hydrogen adsorption on their surface. We confirm that this mechanism allows ultrahigh sensitivity hydrogen-gas sensing, achieving a limit of detection of 0.25-ppm hydrogen gas. In addition, we find that an optimized structure for the present detection mechanism is different from those in conventional sensors based on the gap-narrowing/closing mechanism.

show abstract

Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

et al. 2023

Self Cite

View full text Add to dashboard Cite

Quartz-crystal-microbalance (QCM) biosensor is a typical label-free biosensor, and its sensitivity can be greatly improved by removing electrodes and wires that would be otherwise attached to the surfaces of the quartz resonator. The wireless-electrodeless QCM biosensor was then developed using a microelectro-mechanical systems (MEMS) process, although challenges remain in the sensitivity, the coupling efficiency, and the miniaturization (or mass production). In this study, we establish a MEMS process to obtain a large number of identical ultrasensitive and highly efficient sensor chips with dimensions of 6 mm square. The fundamental shear resonance frequency of the thinned AT-cut quartz resonator packaged in the microchannel exceeds 160 MHz, which is excited by antennas deposited on inner walls of the microchannel, significantly improving the electro-mechanical coupling efficiency in the wireless operation. The high sensitivity of the developed MEMS QCM biosensors is confirmed by the immunoglobulin G (IgG) detection using protein A and ZZ-tag displaying a bionanocapsule (ZZ-BNC), where we find that the ZZ-BNC can provide more effective binding sites and higher affinity to the target molecules, indicating a further enhancement in the sensitivity of the MEMS QCM biosensor. We then perform the label-free C-reactive protein (CRP) detection using the ZZ-BNC-functionalized MEMS QCM biosensor, which achieves a detection limit of 1 ng mL–1 or less even with direct detection.

show abstract

Highly sensitive hydrogen detection using curvature change of wireless-electrodeless quartz resonators

Abstract: Hydrogen-gas sensing at low concentrations using extremely narrow gap palladium nanoclusters prepared by resistive spectroscopy

Cited by 11 publications

References 51 publications

MEMS hydrogen gas sensor with wireless quartz crystal resonator

MEMS hydrogen gas sensor with wireless quartz crystal resonator

Hydrogen-gas sensing at low concentrations using extremely narrow gap palladium nanoclusters prepared by resistive spectroscopy

Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

Contact Info

Product

Resources

About