Highly sensitive giant magnetoresistance (GMR) based ultra low differential pressure sensor

Borole, Umesh P.; Subramaniam, Sasikala; Kulkarni, Ishan R.; Saravanan, P.; Barshilia, Harish C.; Chowdhury, P.

doi:10.1016/j.sna.2018.07.022

Cited by 30 publications

(15 citation statements)

References 12 publications

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“…The capability of converting magnetic signals to electrical signals has led to the successful implementation of sensors based on the MR effect. To date, MR sensors have been widely employed in various applications such as hard disk drives [1], magnetic random access memory (MRAM) [2], pressure measurement [3,4], current sensing [5,6], position sensing [7][8][9], and biosensing [10][11][12] ( Figure 1). The first application of MR sensors to detect biological signals was proposed about 20 years ago by Baselt et al [13], and they have attracted great attention since then [14][15][16].…”

Section: Introductionmentioning

confidence: 99%

“…The authors' perspectives on the pros and cons of different MR biosensors and their future development for next-generation magnetic biosensing will also be provided. [3,5,22,23] with the permission from Elsevier 2019, 2017, 2018, and 2018, respectively.…”

Section: Introductionmentioning

confidence: 99%

“…Schematic illustration of different types of magnetoresistance (MR) sensors and their applications. Reprinted from Ref [3,5,22,23]. with the permission from Elsevier 2019, 2017, 2018, and 2018, respectively.…”

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confidence: 99%

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Advances in Magnetoresistive Biosensors

Saha

et al. 2019

Micromachines

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Magnetoresistance (MR) based biosensors are considered promising candidates for the detection of magnetic nanoparticles (MNPs) as biomarkers and the biomagnetic fields. MR biosensors have been widely used in the detection of proteins, DNAs, as well as the mapping of cardiovascular and brain signals. In this review, we firstly introduce three different MR devices from the fundamental perspectives, followed by the fabrication and surface modification of the MR sensors. The sensitivity of the MR sensors can be improved by optimizing the sensing geometry, engineering the magnetic bioassays on the sensor surface, and integrating the sensors with magnetic flux concentrators and microfluidic channels. Different kinds of MR-based bioassays are also introduced. Subsequently, the research on MR biosensors for the detection of protein biomarkers and genotyping is reviewed. As a more recent application, brain mapping based on MR sensors is summarized in a separate section with the discussion of both the potential benefits and challenges in this new field. Finally, the integration of MR biosensors with flexible substrates is reviewed, with the emphasis on the fabrication techniques to obtain highly shapeable devices while maintaining comparable performance to their rigid counterparts.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Advances in Magnetoresistive Biosensors

Saha

et al. 2019

Micromachines

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“…There is a variety of sensors available in the category, such as Hall sensors, fluxgates or micro-fluxgates, anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR), tunneling magnetoresistance (TMR), and giant magnetoimpedance (GMI) sensors. Of these devices, due to the micro-level dimension, excellent sensitivity, and CMOS compatibility, GMR sensors have attracted more consideration and interest for conventional applications such as detection of weak magnetic fields, angular velocity and acceleration, and inertia navigation and positioning; also for recently emerging applications like ultra-low pressure measurement [1], biological magnetic signals for gene expression analysis [2] and influenza virus detection [3], some novel technologies in water pollution detection [4] and wireless charging for electric vehicles (EVs) [5], and even current monitoring [6] for smart power grids, etc.…”

Section: Introductionmentioning

confidence: 99%

Quasi-Static Current Measurement with Field-Modulated Spin-Valve GMR Sensors

Jeng

Trinh

Hung

et al. 2019

Sensors

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A non-contact current measurement device comprised of a GMR sensor and a ferrite ring core was investigated. The sensor chip employed a high-sensitivity spin-valve full-bridge GMR sensor of which the direct output has non-negligible hysteresis and a limited linear range. By applying an AC modulation current to modulate the output of the GMR sensor, the hysteresis was reduced, and the linear range was over ±0.5 A. The resolution for DC and quasi-static current measurement was 0.1 mA at a 10 Hz bandwidth. The output in proportion to the measured current was obtained either by demodulating the current-sensitive AC signal or by employing the filtered output of the intrinsically nonlinear spin-valve response. The proposed current sensing scheme is suitable for quasi-static current measurement from DC to over 100 Hz.

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“…Micro/nano fabricated devices play an essential role in a variety of applications. [1][2][3][4][5][6] Especially, Micro-fabricated pressure sensors have been commonly employed in many fields, including automobile, 7-9 aerospace 10,11 and biomedical [12][13][14] applications for pressure measurements. Micro-fabricated pressure sensors can be divided into capacitive, 15 piezoresitive, 16 optical, 17 and other types.…”

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confidence: 99%

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

Toàn

Tuoi

Tsai

et al. 2020

Sci Rep

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This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The pd 66 cu 4 Si 30 metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy (HR-TEM) and the corresponding the selected area electron diffraction (SAED). The ultra-flat freestanding metallic glass membrane with 50 nm in thickness and 2 mm in circular diameter has been fabricated successfully. In addition, two kinds of micro-fabricated pressure sensor types, including itself membrane and additional metallic glass bar as piezoresistive sensing elements, are proposed and fabricated. A displacement of membrane can reach over 100 µm without any damage to membrane which is equivalent to over 0.7% of an elastic strain. Besides, the temperature coefficient of resistance of the Pdbased metallic glass thin film is extremely low 9.6 × 10 −6 °c −1. This development of nano-thick metallic glass membrane possibly opens a new field of micro-fabricated devices with large displacement and enhanced sensing.

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Highly sensitive giant magnetoresistance (GMR) based ultra low differential pressure sensor

Cited by 30 publications

References 12 publications

Advances in Magnetoresistive Biosensors

Advances in Magnetoresistive Biosensors

Quasi-Static Current Measurement with Field-Modulated Spin-Valve GMR Sensors

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

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