2011
DOI: 10.1380/ejssnt.2011.146
|View full text |Cite
|
Sign up to set email alerts
|

Highly Sensitive Electrostatic Force Detection Using Small Amplitude Frequency-Modulation Atomic Force Microscopy in the Second Flexural Mode

Abstract: We propose a novel scheme of highly sensitive electrostatic force detection using a small oscillation amplitude of a cantilever in the second flexural mode of frequency-modulation atomic force microscopy, which is useful for Kelvinprobe force microscopy (KFM) and electrostatic force microscopy (EFM). In this novel scheme, the cantilever is mechanically oscillated at the second flexural resonance frequency with a small oscillation amplitude, while the electrostatic force detection is carried out at the first fl… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2016
2016
2020
2020

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(2 citation statements)
references
References 20 publications
(23 reference statements)
0
2
0
Order By: Relevance
“…As the reference signal of SCFM is related to the primary resonance frequency, the signal-tonoise (S=N) ratio of the F 3ω component was improved. 25) In addition, the high-sensitivity frequency modulation detection capability could be impaired by the electrostatic force component in the cantilever vibration when V mod was applied to the sample. To resolve this issue, we stabilized the cantilever vibration by cutting off the electrostatic force in the cantilever deflection signal using a high-pass filter in the FM detector, as the KFM=SCFM reference signal was set to the secondary resonance.…”
Section: Kfm and Scfm Methodsmentioning
confidence: 99%
“…As the reference signal of SCFM is related to the primary resonance frequency, the signal-tonoise (S=N) ratio of the F 3ω component was improved. 25) In addition, the high-sensitivity frequency modulation detection capability could be impaired by the electrostatic force component in the cantilever vibration when V mod was applied to the sample. To resolve this issue, we stabilized the cantilever vibration by cutting off the electrostatic force in the cantilever deflection signal using a high-pass filter in the FM detector, as the KFM=SCFM reference signal was set to the secondary resonance.…”
Section: Kfm and Scfm Methodsmentioning
confidence: 99%
“…However, since the modulation frequency of the electrostatic force component of KFM is set to the primary resonance frequency, the signal-to-noise (S=N) ratio improves. 23) In terms of the vibration frequency of the cantilever, because the electrostatic force component is noise, in this study we cut off the electrostatic force component of KFM using a Butterworth filter, and using this signal as the input signal to the PLL ensured a stable cantilever vibration.…”
Section: Kfm Systemmentioning
confidence: 99%