Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair

Hamamoto, Kohki; Maeda, Yusaku; Terao, Kyohei; Shimokawa, Fusao; Oohira, Fumikazu; Takao, Hidekuni

doi:10.1109/transducers.2019.8808285

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019

DOI: 10.1109/transducers.2019.8808285

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Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair

Kohki Hamamoto

Yusaku Maeda

Kyohei Terao

et al.

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Highly Sensitive Detection of Fine Electrostatic Attraction by Resonance-Driven Silicon-Hair

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References 11 publications

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