“…However, during the process of electric arc, corona discharge, spark, and superheating, SF 6 can be decomposed into SF 2 , SF 3, and SF 4 . Although most of the decomposition products tend to quickly react with F atoms to reform SF 6 molecules, the trace SF 6 decompositions may react with other inevitable gas impurities (mainly H 2 O, O 2, and N 2 ) or materials (electrodes and equipment surfaces), and produce undesirable toxic or corrosive compounds [7] , [8] , [9] , [10] , [11] , [12] , [13] . For example, disulfur decafluoride (S 2 F 10 ) can be produced due to the arcing or corona insulating faults, which is a highly toxic gas with the toxicity of four times that of phosgene.…”