Highly Reliable Piezoelectric Actuator for Precision Stage System

The construction of piezoelectric motors using multiple piezoelectric tubes is proposed in this paper. The static and dynamic characteristics of an eight-tube actuator are studied. The formulas of the bending deflection, moment, and resonant frequency are given. A prototype two-phase traveling wave piezoelectric motor using such a structure is studied. The stator that is composed of eight piezoelectric tubes produces a wobbling motion when excited in a certain pattern. Both the static and dynamic characteristics of the stator were measured. The rotor's angular speed possesses a good linearity with the driving voltage amplitude. With a driving voltage of 200 Vp–p at 5.0 kHz, the motor can rotate at the highest angular speed of 319 rpm and produce a maximum stall torque of 1.6 mN·m. With an applied voltage of 160 Vp–p and a preload of 0.3 N, the motor's working efficiency reached about 12%.

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“…2(a) shows. [8][9][10] To obtain the same function, four piezoelectric tubes are stuck together as a stator, as shown in Fig. 2(b).…”

Section: Typical Multiple-tube Actuators Used In Piezomotorsmentioning

confidence: 99%

Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator

Pan

Zhang

et al. 2009

Jpn. J. Appl. Phys.

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“…Nishibori et al designed a Langevin-type ultrasonic motor using PWM control for robot hand with fingers [4]. Hashiguchi et al proposed a highly reliable non-resonant ultrasonic motor made of cylindrical piezoelectric actuator to drive a highprecision stage [5]. A bimodal-type piezoelectric motor is a typical example of wedge-type motor has been built and popularly used for motion control application [6].…”

Section: Introductionmentioning

confidence: 99%

Internal Model Control using EWMA for speed control of wedge-type piezoelectric motors

Ting

Hou

et al. 2009

2008 IEEE International Conference on Robotics and Biomimetics

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In this article, speed control for a platform driven by a wedge-type piezoelectric motor is investigated. Such a motion control system is subject to disturbance like friction, preload and operating temperature change, so that a predictive linear relation between the applied input voltage and the output platform velocity is difficult to keep. Especially, operating temperature change is an essential problem of using piezoelectric motor, but very few researches introduce the phenomenon in depth and solve the problem. In practical experiment, deterministic drift due to operating temperature change is found and defined as a ramp-function disturbance. Similar to Chemical Mechanical Polishing (CMP) in semiconductor manufacturing process with a linear relation between the input recipe and the output target in a Run-to-Run (RtR) control structure, Exponentially Weighted Moving Average (EWMA) method has been widely used and verified its capability of overcoming systematic change and drift disturbance. Therefore, EWMA method on the basis of RtR control structure is considered to use for speed control purpose. Besides that, it is attempted to map the EWMA method into an Internal Model Control (IMC) to achieve an RtR-IMC adaptive control scheme. Following that, adding a PI compensator in the feedforward path is theoretically proved to be able to deal with the ramp-type disturbance due to operating temperature change. A number of feedback control methods including Single EWMA, Double EWMA, and RtR-IMC_EWMA with a PI compensator design are investigated and examined. From experimental results, Double EWMA with two-stage parameter estimation, as expected, is able to deal with the drift noise and outperforms Single EWMA. The proposed RtR-IMC_EWMA with a PI compensator is superior to other methods. Such a new adaptive control scheme is easy to establish and provides flexibility of adding compensator in the feedforward path to enhance the robustness to external disturbance.Index Terms -piezoelectric motor, EWMA method, Internal Model Control.

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“…In the last decade, the development of novel actuators has been rapid for the innovation of science and industry. In particular, many kinds of piezoactuators and motors have been developed for special applications, [1][2][3][4][5] after two decades from the first successful development of ultrasonic motors.…”

Section: Introductionmentioning

confidence: 99%

Study of Scattering by Surface Acoustic Wave Motor Slider Using Finite Element Method Simulation

Kurosawa

Miyazaki

Sügimura

2007

jjap

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A surface acoustic wave (SAW) motor has already shown its superior potential. However, its efficiency from the electrical input to the mechanical output is still low. To improve its efficiency, an energy circulation driving method has been proposed and demonstrated. It has been found that the Rayleigh wave beneath the slider was scattered, so that the phase of the wave shifted; the phase shift decreased the efficiency of the motor. Thus, we need to know the characteristics of the phase shift to design a SAW motor with a high efficiency. From several experimental results, it has been found that the phase shift is related to the projection parameters of the slider and the preload conditions. The relationship between the slider projection contact, the friction phenomenon, and the phase shift was investigated by numerical simulation using the finite element method. Twodimensional finite element method analysis in a time domain was carried out to simulate the wave propagation from driving points through a preloaded silicon slider. Contact and friction simulation was applied to the boundary condition between the stator and the slider projections.

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Highly Reliable Piezoelectric Actuator for Precision Stage System

Cited by 5 publications

References 10 publications

Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator

Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator

Internal Model Control using EWMA for speed control of wedge-type piezoelectric motors

Study of Scattering by Surface Acoustic Wave Motor Slider Using Finite Element Method Simulation

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