Highly Reduced Phase Transition Hysteresis of Vanadium Dioxide Thin Films in Multilayer Structure with Titanium Dioxide
Bunyod Allabergenov,
Sanghun Yun,
Uchkun Kutliev
et al.
Abstract:Herein, we present the electrical, structural, and optical characteristics of pristine VO 2 , VO 2 /TiO 2 , and TiO 2 /VO 2 / TiO 2 thin films deposited on a conventional glass substrate via magnetron sputtering. To obtain a crystallized structure, the asdeposited films were annealed in a tube furnace at 450 and 550 °C in an oxygen atmosphere at 20−25 mTorr for 90 min. The prepared films were characterized by four-point probe resistivity, X-ray diffraction, X-ray photoelectron spectroscopy, ultraviolet− visibl… Show more
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