Highly precise thickness measurement of multilayer films based on the cross-correlation algorithm using a widely tunable MG-Y laser
Yang Cheung,
Zhenguo Jing,
Ang Li
et al.
Abstract:Inspired by the demodulation algorithm of Fabry–Perot composite sensors in the field of fiber-optic sensing, this paper proposes a method based on a widely tunable modulated grating Y-branch (MG-Y) laser combined with the cross-correlation algorithm to achieve a highly precise measurement of the optical thickness of each layer of a multilayer optical sample. A sample consisting of a double glass stack was selected, and the interference spectrum of the stacked sample was acquired using a widely tunable MG-Y las… Show more
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