Abstract:We report the high performances of Metal-Insulator-Semiconductor Photodetectors (MIS PD) made with crystalline Ge nanocrystals (Ge NCs) as the active absorbers embedded in a silicon dioxide matrix. The Ge NCs have been obtained by a combination of Ge deposition by Molecular Beam Epitaxy (MBE) on tunnel thermal silicon oxide and solid state dewetting processes. Ge NCs structure and morphology are characterized by High Resolution Transmission Electron Microscopy (HRTEM) and Scanning Electron Microscopy (SEM). Th… Show more
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