Wavelength-matched vibrational excitations of ethylene ͑C 2 H 4 ͒ molecules using a tunable carbon dioxide ͑CO 2 ͒ laser were employed to significantly enhance the chemical vapor deposition ͑CVD͒ of diamond in open air using a precursor gas mixture of C 2 H 4 , acetylene ͑C 2 H 2 ͒, and oxygen ͑O 2 ͒. The CH 2 -wag vibration mode ͑ 7 ͒ of the C 2 H 4 molecules was selected to achieve the resonant excitation in the CVD process. Both laser wavelengths of 10.591 and 10.532 m were applied to the CVD processes to compare the C 2 H 4 excitations and diamond depositions. Compared with 10.591 m produced by common CO 2 lasers, the laser wavelength of 10.532 m is much more effective to excite the C 2 H 4 molecules through the CH 2 -wag mode. Under the laser irradiation with a power of 800 W and a wavelength of 10.532 m, the grain size in the deposited diamond films was increased by 400% and the film thickness was increased by 300%. The quality of the diamond crystals was also significantly enhanced.