Highly efficient optical antenna with small beam divergence in silicon waveguides

Ginel‐Moreno, Pablo; Pereira-Martín, Daniel; Hadij‐ElHouati, Abdelfettah; Ye, Winnie N.; Melati, Daniele; Xu, D.‐X.; Janz, Siegfried; Ortega‐Moñux, Alejandro; Wangüemert‐Pérez, J. Gonzalo; Halir, Robert; Molina-Fernández, Í.; Schmid, Jens H.; Cheben, Pavel

doi:10.1364/ol.404012

Cited by 28 publications

(9 citation statements)

References 17 publications

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“…The grating attenuation coefficient (α) of the antenna is determined through FDTD simulations by evaluating the power input to the grating antenna (P in ) and the remaining power (P out ) at the end of 35 periods. The formula [35]…”

Section: Numerical Results and Discussionmentioning

confidence: 99%

Subwavelength grating waveguide antenna based on interleaved groove structure

Chen,

Liu,

et al. 2024

Eng. Res. Express

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Integrated optical antennas are essential components of optical phased arrays for applications in light detection and ranging technology. To achieve larger detection distances, wider detection ranges, and higher scanning resolutions, it is imperative to employ millimeter-scale or longer effective lengths to achieve a narrow beam width, coupled with high radiation efficiency. In the high refractive index contrast silicon photonics platform, achieving a narrow far-field beam width and high radiation efficiency simultaneously is a formidable challenge. In the article, a subwavelength grating waveguide antenna with interleaved grooved lateral radiating block arrays is proposed. The simulation result shows that an effective length of about 3.3 mm is attained, with a corresponding far-field beam width is 0.02°, and a radiation efficiency of 0.785 at the wavelength of 1550 nm. It is also found that the crosstalk between the adjacent grating antennas designed in the range of 1.49 μm ~ 1.61 μm is less than -15.6 dB.

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Section: Numerical Results and Discussionmentioning

confidence: 99%

Subwavelength grating waveguide antenna based on interleaved groove structure

Chen,

Liu,

et al. 2024

Eng. Res. Express

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“…Surface gratings as optical antennas are designed to radiate the light out of the chip, facilitating free-space beam shaping and steering, which is desired for surging applications in LIDARs or free-space optical communications. Both very long (mm-scaled) andultra-short (μm-scaled) surface gratings with weak and strong radiation can be advantageously utilized as efficient optical antennas in one-dimensional (1-D) or two-dimensional (2-D) OPAs [35][36][37][38]. Figure 2a show a schematic view the optical nano-antenna implemented on a 220 nm thick SOI platform.…”

Section: Silicon Antennasmentioning

confidence: 99%

Silicon-based surface gratings for efficient fiber-chip and free-space beam coupling

Benedikovič

Fraser

Korcek

et al. 2023

Integrated Optics: Design, Devices, Systems and Applications VII

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Silicon photonics has established itself as a key integration platform, leveraging high-quality materials and large-scale manufacturing using mastered toolsets of complementary metal-oxide-semiconductor (CMOS) foundries. Chip-scale photonics offer unique promises for dense integration of versatile optical functions through compact and high-performance building blocks. Integrated photonics is now competing technology for many applications, spanning from telecom/datacom and interconnects up to quantum sciences and light detection and ranging (LIDAR) systems, among others. However, the lack of low-loss input/output chip interfaces can be prohibitive to successfully deploy multi-diverse device applications. Low coupling loss is essential in reducing overall power budget in photonic systems, impacting on-chip integration level. The light coupling from an off-chip environment into the planar waveguide platforms has always been a challenging research problem since the early years of integrated photonics. Optical interfaces formed on a photonic chip surface, rather than implemented on a chip edge, have been widely used to access photonic circuits with optical fibers or enabling free-space coupling of light beams. Surface gratings can be positioned at arbitrary locations and/or arranged in pre-defined patterns on the chip, facilitating wafer-scale testing and optical packaging. In this work, we present our recent progress in the development of silicon-based surface gratings for use in fiber-to-chip and free-space beam coupling. In particular, we discuss prospective design approaches to develop low-loss surface grating couplers implemented on silicon-on-insulator (SOI), silicon nitride (SiN), and hybrid silicon-silicon nitride (Si-SiN) platforms, allowing to approach a coupling loss below -1 dB. Among these, we also cover contemporary advances in compact silicon metamaterial nano-antennas for dense optical phased arrays, obtaining high a diffraction performance (> 90%) and wideband operation (> 200 nm) simultaneously.

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“…To achieve such requirements it is required to fabricate features below 10 nm which are hard to achieve with high precision even with electron-beam lithography processes. To overcome this problem, a subwavelength segmented core OPA topology has been proposed recently [15,16], enabling precise control of the modal confinement and loading of evanescently coupled radiative elements. Nonetheless, feature sizes as small as 80 nm are still required to fabricate OPAs using this topology.…”

Section: Introductionmentioning

confidence: 99%

UV-written silicon nitride integrated optical phased arrays

Ilie

Paoli

Flint

et al. 2022

Smart Photonic and Optoelectronic Integrated Circuits 2022

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Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and related photonic components. We have previously developed an NH3-free SiN PECVD platform in which its optical properties can be tailored. Here, we report on a new type of surface-emitting nitrogen-rich silicon nitride waveguide with antenna lengths of L > 5 mm. This is achieved by using a technique called small spot direct ultraviolet writing, capable of creating periodic refractive index changes ranging from -0.01 to -0.04. With this arrangement, a weak antenna radiation strength can be achieved, resulting in far-field beam widths < 0.015 0 , while maintaining a minimum feature size equal to 300 nm, which is compatible with DUV scanner lithography.

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Highly efficient optical antenna with small beam divergence in silicon waveguides

Cited by 28 publications

References 17 publications

Subwavelength grating waveguide antenna based on interleaved groove structure

Subwavelength grating waveguide antenna based on interleaved groove structure

Silicon-based surface gratings for efficient fiber-chip and free-space beam coupling

UV-written silicon nitride integrated optical phased arrays

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