Highly efficient deterministic polishing using a semirigid bonnet

Wang, Chunjin; Yang, Wei; Wang, Zhenzhong; Xu, Yang; Sun, Zaihong; Zhong, Bo; Pan, Rongrong; Yang, Ping; Ye, Guo; Xu, Qiao

doi:10.1117/1.oe.53.9.095102

Cited by 37 publications

(9 citation statements)

References 30 publications

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“…Our group has newly developed a novel bonnet polishing [7,[9][10] tool, which is semi-rigid, called "SR bonnet" [11]. The polishing pressure between the SR bonnet and the work-piece is mainly influenced by z-offset and the inflated-pressure.…”

Section: Introductionmentioning

confidence: 99%

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Wang

Zhong³

et al. 2014

SPIE Proceedings

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The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It's observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.

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Section: Introductionmentioning

confidence: 99%

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Wang

Zhong³

et al. 2014

SPIE Proceedings

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“…In the previous studies on bonnet polishing, the main focus was on the tool influence function (TIF), the influence and optimization of process parameters, and the realization of deterministic polishing. Wang et al 22,23 studied the TIF and the contact area to achieve the deterministic material removal. They proposed three kinds of TIFs (sTIFt, sTIFd, and sTIFc).…”

Section: Introductionmentioning

confidence: 99%

Polishing path generation for physical uniform coverage of the aspheric surface based on the Archimedes spiral in bonnet polishing

Zhao

Zhang

Han

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part B:

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As a new polishing method, bonnet polishing is suitable for polishing the curved surface due to its advantages in flexibility and adaptability of the polishing tool. In the polishing process, the contact state between the bonnet and the curved surface always changes. The traditional polishing tool path with equal interval will inevitably lead to over-polished areas and unpolished areas. In this article, a new tool path for bonnet polishing, which is called the revised Archimedes spiral polishing path, is proposed to ensure the physical uniform coverage of the curved surface in bonnet polishing. The path generation method is based on the modified tool–workpiece contact model and the pointwise searching algorithm. To prove the effectiveness of the revised path, two aspheric workpieces were polished along the traditional Archimedes spiral polishing path and the revised path, respectively. The roughnesses of the two workpieces are 10.94 and 10 nm, and the profile tolerances are 0.4097 and 0.2037 μm, respectively. The experimental results show that the revised path achieves lower roughness and surface tolerance than the traditional Archimedes path, which indicates that the revised path can achieve uniform physical coverage on the surface.

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“…For dressing technology, the cup grinding wheel dressing technology can get dressing section with high straightness, so it can be able to achieve any convex sections combining this property with dressing motion, and it is easy to get high shape accuracy. 10–15…”

Section: Introductionmentioning

confidence: 99%

“…For polishing, related investigations of polishing tool are mainly the dressing of polishing pad in chemical mechanical polishing. [8][9][10] Tool form dressing and measurement of polishing tool need further studies. For dressing technology, the cup grinding wheel dressing technology can get dressing section with high straightness, so it can be able to achieve any convex sections combining this property with dressing motion, and it is easy to get high shape accuracy.…”

Section: Introductionmentioning

confidence: 99%

Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing

Wang

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part C:

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Bonnet polishing is widely used in final processing of optical elements, as the bonnet tool has the characteristic of fine surface adaptability and controllable pressure. For the purpose of ensuring the stability and exact controllability of polishing process, it is necessary to make precise dressing of bonnet tool. In this paper, first a dressing scheme using cup diamond wheel is proposed for bonnet tool, and then the feasibility of the dressing scheme is verified by analyzing the trajectory and the envelope of the diamond particles on the cup wheel. After that, the influences of the dressing process parameters on the dressing efficiency and trajectory distribution are defined through theoretical analysis and MATLAB simulation, and by simulation the dressing process parameters are determined. In addition, a trimmed program with variable speed ratio is proposed to homogenize the dressing tracks. Finally, an experiment was conducted to test the simulation result. This paper provides the theoretical basis for actual dressing process of the bonnet tool.

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Highly efficient deterministic polishing using a semirigid bonnet

Cited by 37 publications

References 30 publications

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Polishing path generation for physical uniform coverage of the aspheric surface based on the Archimedes spiral in bonnet polishing

Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing

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