Highly Efficient Deposition of Centimeter‐Scale MoS₂ Monolayer Film on Dragontrail Glass with Large Single‐Crystalline Domains

Abstract

Highly efficient growth of a centimeter‐scale MoS2 monolayer film by oxide scale sublimation chemical vapor deposition (OSSCVD) in a time as short as 60 s is reported. Benefiting from the superior catalytic ability of Dragontrail glass (DT‐glass) substrate and the controlled large vapor supersaturation of the molybdenum source, the ultrafast deposition of MoS2 is realized with maintaining large‐sized single‐crystalline domains over 20 µm at maximum in the film. It is comparable to those reported for MoS2 grown in tens of minutes and even hours. Similar to the face‐to‐face precursor feed route, the gas‐controlled OSSCVD with a showerhead configuration facilitates a homogeneous and controllable source supply. It enables high‐quality monolayer MoS2 film deposition on 2 × 2 cm2 DT‐glass with centimeter‐scale uniformity confirmed by microscopic, spectroscopic, and electrical characterizations. Back‐gate MoS2 field‐effect transistors fabricated on polycrystalline continuous film exhibit the maximum field‐effect mobility of 5.1 cm2 V−1s−1 and a peak Ion/Ioff ratio of 5 × 108. They reach 40 cm2 V−1 s−1 and 1.2 × 109, respectively, on single‐crystalline domains. These results are even greater than those for MoS2 grown using 1–2 orders of magnitude longer deposition time and higher temperatures. This study highlights the opportunities for low‐cost high‐throughput production of large‐area high‐quality monolayer MoS2.

High Resolution Electrochemical Imaging for Sulfur Vacancies on 2D Molybdenum Disulfide

“…As shown in Figure 1g, two distinct peaks at ≈380.9 and 405.5 cm −1 , corresponding to the inplane E 1 2g and outofplane A 1g vibra tion modes of 2HMoS 2 , respectively, can be clearly identified in the spectra. [37] The magnified Raman patterns indicate slightly redshift of the E 1 2g peak and A 1g peak of SV2HMoS 2 , peaks at 377.2 and 403.3 cm −1 , illustrating the softening of the MoS phonon mode in the basal plane, which can be ascribed to the gradually declined number of MoS chemical bonds along with the increased amount of inplane S vacancies. [38,39] Moreover, Xray photoelectron spectroscopy (XPS) was utilized to investi gate the elemental chemical states of Mo and S in 2HMoS 2 and SV2HMoS 2 , respectively.…”

Broad band modulation of two-dimensional Mo1-x W x S2 by variational compositions

“…The composition x can be modulated from 0 to 1 by adjusting the growth temperature and the proportion of the precursors, the compositional variation of W to Mo is limited within a range of less than 0.1. Because the synthesizing temperature of MoS 2 is lower than that of WS 2 , the composition x can be increased by increasing the synthesizing temperature [15,16]. At the beginning of the synthetic process, a large amount of S powder is added to create a Srich atmosphere.…”

“…Among which, CVD technique is considered as one of the most promising methods for synthesizing TMDCs with large-area, controllable thickness, and high quality. Photoelectric performances of the binary TMDCs grown by CVD method have been extensively investigated in previous work, but bandgap engineering of TMDCs is still in the earlier stage due to the limited physical space of 2D TMDCs for composition modulations [14][15][16]. Even so, it is of crucial importance to broaden their applications that similar to the traditional semiconductors, especially in electronics and optoelectronics, since a controllably modulated bandgap provides many advantages, including multi-wavelength emission, suppression of deep-level defects, and broad photocurrent modulation [17][18][19][20][21][22].…”

2D‐Material‐Fused High‐Emittance Plasmo–Photonic Metasurfaces

“…For future applications, large-scale growth is also being studied to enable the production of wafer-scale TMDC monolayers. [6][7][8][9] By combining the direct-bandgap luminescence of TMDC monolayers with surface-enhancing effects that are attempted to be artificially realized on metasurfaces and nanostructures, novel and highly efficient light-emitting systems showing spontaneous emissions [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27] and a stimulated emission [28] have been extensively explored. The stimulated emission was reported using a photonic crystal cavity whereas the contrast of the stimulated emission to spontaneous emission was not so high, being ≈10; [28] it is thus unclear whether the stimulated emission deserves practical use.…”