Highly Collimated Light Emission of Deep‐Ultraviolet Light‐Emitting Diodes Using Fresnel Zone Plate Nanodiffraction Patterns
Lingjie Wei,
Shin‐ichiro Inoue
Abstract:Fresnel zone plates (FZPs) are diffractive optical structures composed of many symmetrical concentric rings and are widely used in nanofocusing and beam collimation. In this article, the effect of substrate thickness on the beam collimation and light‐extraction efficiency (LEE) enhancement of deep‐ultraviolet (DUV) micro‐light‐emitting diodes (micro‐LEDs) with FZPs are experimentally analyzed. The far‐field patterns and LEE enhancements of the DUV micro‐LEDs are effectively controlled by the FZPs. Optimization… Show more
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