Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases

Choi, Ji Hyun; Hwang, Su Min; Lee, Jai Yong; Garay, Adrian Adalberto; Chung, Chee Won

doi:10.1016/j.vacuum.2016.08.003

Cited by 3 publications

(1 citation statement)

References 12 publications

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“…A higher ICP source power can give higher plasma density, while increasing the bias power can lead to higher energy of the bombarding etchant ions. As reported in the literature, we also observed that by raising either or both the powers [28,29] resulted in a higher etching rate [30], while raising the ICP power and/or gas pressure [31] leads to an increase in the etching rate as well as the undercut [32] in the masked area.…”

Section: Dry Etchingsupporting

confidence: 87%

Enhancing light absorption in a thin film silicon tandem solar cell fabricated on a reactive ion etched nano-structured glass surface

Ahn

Iftiquar

Cho

et al. 2018

J. Phys. D: Appl. Phys.

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The efficient capture and absorption of light are important aspects in improving the photovoltaic conversion efficiency of a solar cell. In a two-terminal tandem device, the output current density is limited by the lowest current-generating component sub-cell. We attempted by experiment to improve the current density of both sub-cells, using an inverted pyramid-type textured glass substrate. One of the two surfaces of the glass substrates was textured by semi-anisotropic reactive ion etching (RIE) with a 100 sccm flow rate of SF 6 gas, and with 7 µm × 7 µm square-shaped etch masks, and obtained an optimum texture of base dimension ~7 µm, height ~8.5 µm, tip diameter ~75 nm and tip to tip separation between neighboring pyramids were about 9 µm. Tandem solar cells that were fabricated on these textured surfaces receive light from the base of these micro-pyramids, thereby enhancing light absorption in the active layers of the device. The shape of the texture and orientation of layers of the tandem solar cell ensured a longer optical path inside the solar cell, leading to higher optical absorption and an improvement in device performance. We observed an increase in the short circuit current density from 11.52 to 14.30 mA cm −2 , and in the device efficiency from 11.97% to 14.22%.

show abstract

Section: Dry Etchingsupporting

confidence: 87%

Enhancing light absorption in a thin film silicon tandem solar cell fabricated on a reactive ion etched nano-structured glass surface

Ahn

Iftiquar

Cho

et al. 2018

J. Phys. D: Appl. Phys.

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show abstract

Reactive ion etching of tantalum in silicon tetrachloride

Al-mashaal

Cheung

2022

Microelectronic Engineering

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Fabrication of thermally stable mid-infrared optical filters using tantalum microdisc array

Lee

Cha

Jin

et al. 2022

Applied Physics Letters

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To fabricate a thermally stable optical filter in the mid-infrared (MIR) region, a plasmonic metal disk array (PMDA) using tantalum (Ta) was proposed, and the filter performance was compared with that of conventional silver (Ag)-based PMDAs. A finite-difference time-domain method was utilized to systematically analyze the effects of geometric configuration and constituent materials on the optical properties of PMDA filters with a periodic hexagonal lattice. Unlike the Ag PMDA filters, whose transmission dip at resonance wavelengths gradually decreased with increasing temperature, the Ta PMDA filters revealed almost the same transmission spectra even after annealing at 700 °C for 30 min. The Ta-based MIR PMDA filter exhibited similar optical properties to those of the Ag PMDA. The PMDAs with a duty cycle (d.c.) of 60% exhibited stop band spectra with sufficiently deep dip and wide linewidth. MIR filters fabricated with the Ta disks were demonstrated to quantify different types of alcohols through the monitoring of transmission spectra.

show abstract

Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases

Cited by 3 publications

References 12 publications

Enhancing light absorption in a thin film silicon tandem solar cell fabricated on a reactive ion etched nano-structured glass surface

Enhancing light absorption in a thin film silicon tandem solar cell fabricated on a reactive ion etched nano-structured glass surface

Reactive ion etching of tantalum in silicon tetrachloride

Fabrication of thermally stable mid-infrared optical filters using tantalum microdisc array

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