“…FDTD Solutions from Lumerical Inc. had been used for electromagnetic field simulation. Based on our former design method that had been published in [ 24 ], the parameters of PC-based nanofluidic structure had been optimized [ 25 ]. The gratings period was set as 400 nm, which is a reasonable value for PC fabrication with resonance wavelength located at visible wavelength range.…”
Section: Methodsmentioning
confidence: 99%
“…The electric field distribution and enhancement factor of all these PC structures were obtained by running FDTD simulation software, and the PC structure which can yield an appropriate electric field distribution and enhancement factor was chosen as our sensor structure. The related PC based FDTD simulation process can be found in our former published papers [ 24 , 26 ]. Fig.…”
Photonic crystal (PC)-based devices have been widely used since 1990s, while PC has just stepped into the research area of nanofluidic. In this paper, photonic crystal had been used as a complementary metal oxide semiconductors (CMOS) compatible part to create a nanofluidic structure. A nanofluidic structure prototype had been fabricated with CMOS-compatible techniques. The nanofluidic channels were sealed by direct bonding polydimethylsiloxane (PDMS) and the periodic gratings on photonic crystal structure. The PC was fabricated on a 4-in. Si wafer with Si3N4 as the guided mode layer and SiO2 film as substrate layer. The higher order mode resonance wavelength of PC-based nanofluidic structure had been selected, which can confine the enhanced electrical field located inside the nanochannel area. A design flow chart was used to guide the fabrication process. By optimizing the fabrication device parameters, the periodic grating of PC-based nanofluidic structure had a high-fidelity profile with fill factor at 0.5. The enhanced electric field was optimized and located within the channel area, and it can be used for PC-based nanofluidic applications with high performance.
“…FDTD Solutions from Lumerical Inc. had been used for electromagnetic field simulation. Based on our former design method that had been published in [ 24 ], the parameters of PC-based nanofluidic structure had been optimized [ 25 ]. The gratings period was set as 400 nm, which is a reasonable value for PC fabrication with resonance wavelength located at visible wavelength range.…”
Section: Methodsmentioning
confidence: 99%
“…The electric field distribution and enhancement factor of all these PC structures were obtained by running FDTD simulation software, and the PC structure which can yield an appropriate electric field distribution and enhancement factor was chosen as our sensor structure. The related PC based FDTD simulation process can be found in our former published papers [ 24 , 26 ]. Fig.…”
Photonic crystal (PC)-based devices have been widely used since 1990s, while PC has just stepped into the research area of nanofluidic. In this paper, photonic crystal had been used as a complementary metal oxide semiconductors (CMOS) compatible part to create a nanofluidic structure. A nanofluidic structure prototype had been fabricated with CMOS-compatible techniques. The nanofluidic channels were sealed by direct bonding polydimethylsiloxane (PDMS) and the periodic gratings on photonic crystal structure. The PC was fabricated on a 4-in. Si wafer with Si3N4 as the guided mode layer and SiO2 film as substrate layer. The higher order mode resonance wavelength of PC-based nanofluidic structure had been selected, which can confine the enhanced electrical field located inside the nanochannel area. A design flow chart was used to guide the fabrication process. By optimizing the fabrication device parameters, the periodic grating of PC-based nanofluidic structure had a high-fidelity profile with fill factor at 0.5. The enhanced electric field was optimized and located within the channel area, and it can be used for PC-based nanofluidic applications with high performance.
“…When a beam of light interacts with a photonic crystal sensor with a certain polarization and angle, a specific frequency of the incident light will resonate with the photonic crystal structure and be reflected. There are two types of factors that affect the peak resonance wavelength: 1) Photonic crystal parameters, including period, duty cycle, and film thickness of the high refractive index layer; 2) The refractive index of photonic crystal materials and external environment . Since the structures of conventional photonic crystal sensors are fixed once fabricated, the variation of peak resonance wavelength is mainly affected by the change of effective refractive index caused by environmental stimuli, therefore, photonic crystal is generally used for detecting analytes in the fields of biochemistry and life science.…”
Section: Flexible and Stretchable Photonic Sensorsmentioning
Emerging technologies, such as soft robotics, electronic skin, wearable devices, and flexible display, demand the practical application of photonic sensors that are bendable and stretchable, as conventional photonic sensors are fabricated with rigid materials and substrates, rendering their applications in deformable state or soft systems infeasible. Thus, the development of flexible and stretchable photonic sensors, which can be wrapped onto curved surfaces and easily deformed into different shapes and sizes, has inspired great research interest. This article presents recent progress in the development of flexible and stretchable photonic sensors, particularly photonic sensors based on the modulation of light transmission, from the aspects of materials synthesis and selection, structure design, fabrication methods, sensing characteristics, and performances. The challenges and future research opportunities related to flexible and stretchable photonic sensors and their potential application prospects are also discussed.
“…The fourth industrial revolution or Industry 4.0 (I4) exploits machines that are augmented by means of internet connections and sensor networks and are controlled by intelligent systems capable of monitoring the entire production chain and making autonomous decisions [1], [2]. This enables workpiece production with high levels of adaptability in terms of manufacturing conditions and design adjustments, which ultimately results in high-quality manufacturing at high yields [3], [4]. In detail, the I4 paradigm encompasses technologies that belong to two broad categories, often known as digital and physical worlds.…”
The high versatility of laser direct-write (LDW) systems offers remarkable opportunities for Industry 4.0. However, the inherent serial nature of LDW systems can seriously constrain manufacturing throughput and, consequently, the industrial scalability of this technology. Here we present a method to parallelise LDWs by using acoustically shaped laser light. We use an acousto-optofluidic (AOF) cavity to generate acoustic waves in a liquid, causing periodic modulations of its refractive index. Such an acoustically controlled optical medium diffracts the incident laser beam into multiple beamlets that, operating in parallel, result in enhanced processing throughput. In addition, the beamlets can interfere mutually, generating an intensity pattern suitable for processing an entire area with a single irradiation. By controlling the amplitude, frequency, and phase of the acoustic waves, customised patterns can be directly engraved into different materials (silicon, chromium, and epoxy) of industrial interest. The integration of the AOF technology into an LDW system, connected to a wired-network, results into a cyber-physical system (CPS) for advanced and high-throughput laser manufacturing. A proof of concept for the computational ability of the CPS is given by monitoring the fidelity between a physical laser-ablated pattern and its digital avatar. As our results demonstrate, the AOF technology can broaden the usage of lasers as machine tools for industry 4.0
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