“…Typical application fields are the automotive industry, communication sector, consumer industry, health care, security, and environmental monitoring (Grace, ; Hierold et al., ; Crone, ). Diversity causes difficulties in creating coherent manufacturing processes, especially in the case of packaging, which often inhibits commercialization (Tadigadapa and Najafi, ; Tierney and Walsh, ; Martin, ). While MEMS technologies matured in the last 20 years, there still exist fundamental and technological challenges in NEMS, especially in developing reproducible techniques allowing mass production of such complex devices (Ekinci and Roukes, ).…”