2019
DOI: 10.1016/j.ultras.2019.03.001
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High-velocity non-attenuated acoustic waves in LiTaO3/quartz layered substrates for high frequency resonators

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Cited by 49 publications
(28 citation statements)
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“…Li and Ta co-doping shows the lowest velocities, which mainly due to the fact that Ta is the heaviest among our considered elements. The velocities at any particular concentration of our considered co-dopants are quite comparable with these of Sc doped w-AlN, and also comparable with the velocities in the range of 5-7 km/s for LiNbO 3 or LiTaO 3 crystals depending on the cuts [53,56].…”
Section: Resultssupporting
confidence: 61%
“…Li and Ta co-doping shows the lowest velocities, which mainly due to the fact that Ta is the heaviest among our considered elements. The velocities at any particular concentration of our considered co-dopants are quite comparable with these of Sc doped w-AlN, and also comparable with the velocities in the range of 5-7 km/s for LiNbO 3 or LiTaO 3 crystals depending on the cuts [53,56].…”
Section: Resultssupporting
confidence: 61%
“…However, further simulations showed that the longitudinal wave is not entirely localized in the film even when its attenuation coefficient tends to zero, and the acoustic energy stays distributed between the film and the substrate. Non-attenuated longitudinal waves with similar structure were recently found in a lithium tantalate plate bonded to a quartz substrate [15]. Normalized frequency, 2pf, km/s…”
supporting
confidence: 55%
“…For designing electroacoustic devices, e.g., film bulk acoustic resonators (FBARs) or surface acoustic wave (SAW) resonators for their applications in the frequency filters and duplexers for next-generation wireless communication systems, acoustic wave velocity is an important parameter, which is also sometimes used to estimate the elastic constants in experiments. Compared to other piezoelectrics, , a high acoustic wave velocity of w-AlN is one of the key advantages for high-frequency SAW resonators. We compute the elastic wave velocity by solving the Christoffel equation ( C ijkl η j η k – ρ v 2 δ ij ) u l = 0, where C ijkl is the elastic coefficient factor, η represents the propagation direction of the wave, ρ is the mass density, v is the velocity, and u stands for the wave polarization .…”
Section: Resultsmentioning
confidence: 99%