The paper presents identification of temperature range and gain parameters of long wave infrared camera. Various characteristics of tunable parameters of microbolometer focal plane array were acquired and the optimal operating point was accordingly selected. The camera temperature characteristic and noise-equivalent temperature difference was measured for selected operating point. Results will be used in a project called robust detection system, where there are special requirements to be met.
The paper presents identification of temperature range and gain parameters of long wave infrared camera. Various characteristics of tunable parameters of microbolometer focal plane array were acquired and the optimal operating point was accordingly selected. The camera temperature characteristic and noise-equivalent temperature difference was measured for selected operating point. Results will be used in a project called robust detection system, where there are special requirements to be met.
Abstract-This paper presents an electro-thermal modeling of an amorphous silicon (a-Si) uncooled microbolometer.This modeling provides a comprehensive solution for simulating the electrothermal characteristics of the fabricated microbolometer and enables electro-thermal cosimulation between MEMS and CMOS integrated circuits. To validate this model, three types of uncooled microbolometers were fabricated using a post-CMOS surface micromachining process. The simulation results show a maximum discrepancy of 2.6% relative to the experimental results.
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