The electrochemical performance of the Si nano composite powders produced by PS-PVD was analyzed with Li counter electrode. The PS-PVD powders have showed an improved capacity compared to the raw mg-Si as negative electrode. Furthermore composite powders produced with CH 4 addition showed higher specific gravimetric capacities per Si active materials of 1200 mAh/g, compared to 1024 mAh/g for the powders without C, suggesting the effectiveness of C coating on to the primary nano-Si and SiC particle inclusion for reinforcement of the active materials.