High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System
Dániel Olasz,
Viktória Kis,
Ildikó Cora
et al.
Abstract:High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report the application of this method for the comprehensive TEM characterization of the Y-Ti-O layer system. Variable composition samples (YxTi1−xOy) were prepared by dual DC magnetron sputtering, covering the entire (0 ≤ x… Show more
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