“…The next generation computing devices that evolve towards mobile-oriented, cloud-based, and high speed-driven network environments require manufacturing of ever-decreasing features to meet the demands of advanced technologies including integrated circuits based on advanced transistors logic gates and quantum computing devices based on qubit logic gates [1][2][3]. Dimensional metrology for characterization of these nanoscale features occupies an essential place in the manufacturing process of those nanoscale devices [4,5]. Optical dimension measurement methods have unique benefits of nondestructive character, higher measurement speed, and relatively lower cost, comparing to other major measurement methods such as scanning electron microscopy (SEM) or atomic force microscopy (AFM) [6,7].…”