High-temperature tensile testing machine for investigation of brittle–ductile transition behavior of single crystal silicon microstructure

Uesugi, Akio; Yasutomi, Takahiro; Hirai, Yoshikazu; Tsuchiya, Toshiyuki; Tabata, Osamu

doi:10.7567/jjap.54.06fp04

Cited by 9 publications

(6 citation statements)

References 28 publications

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“…Single crystal 3C-SiC together with ultranano-crystalline diamond (UNCD) and amorph one carbon (ta-C) micro-specimens were tested in membrane deflection experiments 53 , confirming the validity of Weibull theory in predicting the specimen strength when the volume was changed by about two orders of magnitude. At higher temperature, Si becomes plastic and the brittle-to-ductile transition temperature decreases with sample size 54 , as shown for single crystal silicon (SCS) beams with widths of 720nm to 8.7µm in thermo-mechanical bending tests 55 , and for microbeams in tensile regime 56 . However, the matter of the brittle or ductile nature of Si NWs at room temperature is still rather controversial [57][58][59][60][61][62][63][64][65][66][67] .…”

Section: Introductionmentioning

confidence: 92%

Size effects on the fracture of microscale and nanoscale materials

Taloni¹,

Vodret

Costantini

et al. 2018

Nat Rev Mater

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Micro and nanoscale materials have remarkable mechanical properties, such as enhanced strength and toughness, but usually display sample-to-sample fluctuations and non-trivial size effects, a nuisance for engineering applications and an intriguing problem for science. Our understanding of size-effects in small-scale materials has progressed considerably in the past few years thanks to a growing number of experimental measurements on carbon based nanomaterials, such as graphene carbon nanotubes, and on crystalline and amorphous micro/nanopillars and micro/nanowires. At the same time, increased computational power allowed atomistic simulations to reach experimentally relevant sample sizes. From the theoretical point of view, the standard analysis and interpretation of experimental and computational data relies on traditional extreme value theories developed decades ago for macroscopic samples, with recent work extending some of the limiting assumptions of the original theories. In this review, we discuss the recent experimental and numerical literature on micro and nanoscale fracture size effects, illustrate existing theories pointing out their advantages and limitations and finally provide a tutorial for analyzing fracture data from micro and nanoscale samples. We discuss a broad spectrum of materials but provide at the same time a unifying theoretical framework that should be helpful for materials scientists working on micro and nanoscale mechanics.

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Section: Introductionmentioning

confidence: 92%

Size effects on the fracture of microscale and nanoscale materials

Taloni¹,

Vodret

Costantini

et al. 2018

Nat Rev Mater

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“…Plastic deformation in bulk Si has been discussed since early times where it is said to show plastic deformation involving dislocation glide under compressive stress state at over 600 • C. Thanks to the rapid progress of experimental technologies, materials testing intended for characterizing micro/nano-sized materials has been precisely implemented and plastic deformation phenomena in Si have been well discussed [56,[88][89][90][91]. At intermediate temperatures around 100-300 • C, non-linear stress-strain relationship for nanometer-sized single crystal Si beams could be seen [56].…”

Section: Siliconmentioning

confidence: 99%

“…10(a), just before fracture, slip lines produced by dislocation glide in Si at where the maximum tensile stress was applied were clearly observed. For micrometer-sized Si, a brittle-ductile transition temperature was investigated experimentally where dislocation slip was shown at around 450-500 • C [88][89][90]. Transmission electron microscopy (TEM) suggested that even under tensile stress state single crystal Si on a nanometer scale deforms plastically with dislocation glide [90].…”

Section: Siliconmentioning

confidence: 99%

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Namazu

2022

IEEJ Transactions Elec Engng

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By virtue of a great progress of semiconductor fabrication technologies, micro electro‐mechanical systems (MEMS) have been developed for a wide variety of industries. For reliability of MEMS, micromaterials in MEMS need to be examined experimentally, and the obtained results need to be reflected in the design of MEMS. In addition, with the benefit of such the MEMS technology, nowadays mechanical characteristics of nanomaterials have been evaluated precisely. Nanoscale mechanical testing provides an opportunity to find new unique physical phenomena, such as plastic deformation in Si at intermediate temperatures. In this review paper, mechanical testing technologies developed for investigating micro and nanoscale materials are reviewed. Then, mechanical characteristics of Si and other materials evaluated using the micro and nano mechanical testing technologies are introduced. © 2022 Institute of Electrical Engineers of Japan. Published by Wiley Periodicals LLC.

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“…Fracture surface, in brittle crystalline materials, is often sensitive to multiple factors, especially fracture direction. 24,25) Previous experiments, investigating the effect on fracture surface on the direction of cleaving, showed that axial stress in the 〈111〉 crystalline direction results in flat (low roughness) fracture surfaces, perpendicular to the axis. Three types of free-standing silicon micro-beams were fabricated from (110) silicon substrate, with axial directions in 〈100〉, 〈111〉, and 〈110〉 directions [Fig.…”

Section: Introductionmentioning

confidence: 99%

Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap

Banerjee¹,

Hirai²,

Tsuchiya³

et al. 2017

Jpn. J. Appl. Phys.

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Cold field emission characteristics of a fracture fabricated Si nanogap (∼100 nm) were investigated with an ascending electric field (voltage) sweep. The nanogap was formed by controlled fracture of a free-standing silicon micro-beam along 〈111〉 direction by a microelectromechanical device, which results in flat, smooth, and conformal electrode pairs. This facilitates simultaneous large area emission, which gives rise to a significant current at low bias voltage, which usually remains indiscernible in nanogaps of this size. The measured emission current–voltage (I–V) characteristics clearly depict two distinct regimes: a linear (I ∝ V) regime at low bias voltage and a nonlinear [ln(I/V2) ∝ V−1] regime at high bias voltage, separated by a transition point. We propose that the linear regime is owed to direct tunneling of electrons, whereas the nonlinear regime is due to Fowler–Nordheim type emission. This proposition essentially implies that the tunneling potential barrier gradually evolved from a rectangular shape to a triangular shape with increasing field (V). This type of evolution is usually observed in molecular size gaps. We have attempted to correlate the I–V curves acquired through the experiments with the electric field induced barrier shape evolution by numerical calculations involving standard quantum mechanics. The observed linear regime at low bias voltage (<5 V) in a relatively large size gap (∼100 nm) is attributed to the fabrication method adopted in this study. The reported study and the fabricated device are significant for developing a futuristic thermotunneling refrigerator that will find a wide range of application in nanoelectronic devices.

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High-temperature tensile testing machine for investigation of brittle–ductile transition behavior of single crystal silicon microstructure

Cited by 9 publications

References 28 publications

Size effects on the fracture of microscale and nanoscale materials

Size effects on the fracture of microscale and nanoscale materials

Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review

Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap

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