High Temperature Stability of Multicomponent TiAlSiN and CrAlSiN Coatings

Chang, Yin-Yu; Chang, Chi Lung

doi:10.1166/jnn.2010.1678

Cited by 11 publications

(3 citation statements)

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“…The CrAlSiN coatings show high wear resistances in dry machining of Ti-6Al-4V alloys and excellent cutting performance [2]. Furthermore, given the high oxidation temperature and the excellent chemical stability at elevated temperatures that they present, these coatings are also being applied and tested in high temperature applications [3][4][5][6]. More recently, applications for the marine environment were also studied, which is why attention is paid to its resistance to corrosion in environments saturated with NaCl [7].…”

Section: Introductionmentioning

confidence: 99%

Improvement of the Tribocorrosion Properties of Cemented Carbide (WC-Tic-Co) Samples with PVD Coating

et al. 2022

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This study aims to investigate the improvement of the tribocorrosion properties of WC-TiC-Co substrates by coating them with hard coatings such as AlCrSiN using cathodic arc deposition. WC-TiC-Co is commonly used in the fabrication of machining and cutting tools; however, there are some materials such as titanium or stainless steel that are difficult to work with; furthermore, in aggressive environments or under high temperatures the performance of the machining tools can be affected, and a failure may occur. This coating is intended to ensure the correct performance of the tools in any conditions. The coatings were characterized by glow discharge optical emission spectroscopy (GDOES), scanning electron microscopy (SEM) and X-ray diffraction (XRD). Tribocorrosion, tribology and corrosion tests were performed to evaluate the tribocorrosion properties of the samples. Furthermore, mechanical and adhesive properties of the coating were studied using scratch and nanoindentation tests. The results showed improved tribocorrosion properties in the samples combined with good adhesive and mechanical properties. These results show the possibility of using these coated materials in the most demanding cutting and machining applications.

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Section: Introductionmentioning

confidence: 99%

Improvement of the Tribocorrosion Properties of Cemented Carbide (WC-Tic-Co) Samples with PVD Coating

et al. 2022

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“…Mastery of new semiconductor devices and structures cannot be made without solving the problems of metallization and contact systems (Pedersen et al, 2015). The point is that the role of metallization in modern structures of micro-and nanoelectronics is becoming a key (Chang and Chang, 2010;Okabe et al, 2014;Brincker et al, 2018a;Brincker et al, 2018b;Zhao et al, 2019).…”

Section: Introductionmentioning

confidence: 99%

Degradation Processes in the Ai-Ti-Si System Under Thermal Shock

Скворцов¹,

Koryachko²,

Zuev³

et al. 2020

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In recent years, much attention of developers of integrated microcircuits is given to designing novel types of microprocessors, development, and mastery of technologies of both multilayer 3D integrated circuits and making devices based on complex semiconductors. The aim of the present work is to study thermal processes in the Al-Ti-Si multilayer system up to the development of degradation processes. The degradation issues in aluminum metallization with titanium sublayer deposited onto silicon surface are considered. The evolution of processes of irreversible destruction of film conductor under passage through it of single square-wave current pulses with energy up to 300 mJ and duration of 50…1000 μs was analyzed. It was found that, under the action of a single square-wave current pulse with a duration of no more than 80 μs and energy of 85 mJ, the priority process of structural damage is the melting of the metal film. Increasing pulse duration (τ > 80 μs) changes the priority of thermal degradation, and contact melting becomes the main mechanism of structure damage. It was also found that isothermal annealing leads to improving system heat-conducting properties and increasing critical current densities. This is related to the improvement of adhesion properties of the structure as well as with phase transformations in the Al-Ti-Si system in the course of annealing. The results of the article can be used in further studies of the properties of the AI-TI-SI system, as well as in the creation of semiconductor structures taking into account properties such as high electrical conductivity, good processability, the absence of chemical components in the Al-Si system, chemical stability, and a tendency to electromigration, the possibility of short circuit, high diffusion mobility, low melting point, the inability to attach the wire by soldering.

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“…To improve the oxidation resistance of these films, ternary materials were investigated, such as Ti-Al-N [3,4] and Cr-Al-N [3,5], and they are now widely used in commercial applications. Further increase in the oxidation resistance was achieved by the addition of Si [6][7][8] or combining nitrides of Ti, Al and Cr in quaternary compounds. The latter concept has been found to have promising performance compared to that of ternary films.…”

Section: Introductionmentioning

confidence: 99%