2023
DOI: 10.1109/jsen.2022.3223981
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High-Temperature Self-Compensating Absolute Micro-Pressure Sensor and Its Testing Method

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Cited by 1 publication
(2 citation statements)
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“…Many efforts have been made to address this interference, including structural decoupling, [21,22] calibration, [23][24][25] and multimode sensing. [26][27][28][29][30] Although these decoupling methods can solve environmental problems, there are still inevitable limitations in practical applications.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Many efforts have been made to address this interference, including structural decoupling, [21,22] calibration, [23][24][25] and multimode sensing. [26][27][28][29][30] Although these decoupling methods can solve environmental problems, there are still inevitable limitations in practical applications.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, the structural decoupling method is accompanied by a complicated fabrication process and complex structure, which makes it difficult to utilize the sensor. [21,22] However, calibration, which is the most commonly used method, has chronic limitations, such as the requirement for additional sensors, complexity in designing circuit boards, and complex relationship formulas. [23][24][25] Multimode sensing methods have emerged in recent years owing to their simultaneous pressure and temperature detection ability based on separated sensing mechanisms; however, they still have problems with limited decoupling capability, complex signal collecting systems, and the impossibility of steady temperature detection without a thermal gradient.…”
Section: Introductionmentioning
confidence: 99%