2017
DOI: 10.7567/apex.10.112101
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High-temperature operation of GaN-based vertical-cavity surface-emitting lasers

Abstract: We report GaN-based vertical-cavity surface-emitting lasers (VCSELs) capable of high-temperature operation. The GaN-based VCSELs include double dielectric distributed Bragg reflectors and epitaxially grown p–i–n InGaN multiple-quantum-well active layers initially deposited on c-plane sapphire substrates that are bonded to a silicon substrate with a p-side-down and patterned mirror configuration, allowing effective heat dissipation. GaN-based VCSELs with an emission aperture 10 µm in diameter were fabricated, a… Show more

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Cited by 32 publications
(35 citation statements)
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“…Figure 2b shows the structure having a 10.5-pair SiO 2 /Nb 2 O 5 DBR, 4.5λ cavity and 42-pair AlInN/GaN DBR, which was found to generate the highest output power. Because the DBR materials in this device, such as AlInN, have comparatively low thermal conductivities [29,30], while GaN (the primary cavity material) possesses significant thermal conductivity [31,32], R th is expected to be reduced as a result of implementing a long-cavity structure [33][34][35]. A previous theoretical study by Mei et al [35] assessed the effect of cavity length on R th in the case of a VCSEL based on GaN and having an AlInN/GaN DBR.…”
Section: High-power and Narrow Divergent Beam Performance Using A Lonmentioning
confidence: 99%
See 1 more Smart Citation
“…Figure 2b shows the structure having a 10.5-pair SiO 2 /Nb 2 O 5 DBR, 4.5λ cavity and 42-pair AlInN/GaN DBR, which was found to generate the highest output power. Because the DBR materials in this device, such as AlInN, have comparatively low thermal conductivities [29,30], while GaN (the primary cavity material) possesses significant thermal conductivity [31,32], R th is expected to be reduced as a result of implementing a long-cavity structure [33][34][35]. A previous theoretical study by Mei et al [35] assessed the effect of cavity length on R th in the case of a VCSEL based on GaN and having an AlInN/GaN DBR.…”
Section: High-power and Narrow Divergent Beam Performance Using A Lonmentioning
confidence: 99%
“…where Δλ/ΔPdiss is the wavelength shift over the power dissipation value and Δλ/ΔThs is the wavelength shift over the variation in the heat sink temperature [34][35][36][37]. Δλ/ΔThs values from 0.012 to 0.0185 nm/K have been previously reported for these types of devices [34,35,37,38]. Herein, thermal effects were negated by obtaining the Δλ/ΔThs data in conjunction with pulsed operation, and the 5λ-and 10λ-cavity devices were determined to have values of 0.0142 and 0.0146 nm/K, respectively, which are in agreement with previously reported data.…”
Section: High-power and Narrow Divergent Beam Performance Using A Lonmentioning
confidence: 99%
“…Plots reprinted with permission. 64 Overlaid are the thermal resistance of reported CW-RT VCSEL by NCTU [88], Meijo-Stanley [71], and UCSB [89]. 115 xviii Tables Table 1.1 List of some dielectric materials used in DBRs [106].…”
Section: List Of Figuresmentioning
confidence: 99%
“…This allows metal contact pads to be located away from the aperture (preventing light blocking) and the carriers are transported into the MQWs through an underlying spreading layer. For the p-side, the intracavity contact is usually a transparent conductive oxide such as indium-tin oxide (ITO) [74,88] or a nitridebased tunnel junction (TJ) [81,89], whereas for the n-side they are the highly doped bulk…”
Section: Double Dielectric Structure With Dielectric Dbrsmentioning
confidence: 99%
“…Recently, the potential use of GaN as an optoelectronic device, especially in ultraviolet (UV) lasers applications, has been attracting increasingly more attention. According to the type of microcavity structure, laser devices can be classified into a few categories: random 1,2 , Fabry-Pérot (FP) [3][4][5] , and whispering-gallery mode (WGM) lasers [6][7][8] . The smooth surfaces of a WGM laser's microcavity allow for total internal reflection with minimal optical loss, thus producing a high quality factor (Q) and a lower laser threshold than other types of structures.…”
mentioning
confidence: 99%