1987
DOI: 10.1016/0040-6090(87)90166-0
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High Temperature microhardness of hard coatings produced by physical and chemical vapor deposition

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Cited by 137 publications
(26 citation statements)
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“…In case of PVD TiB 2 , the origin of these stresses can be mainly attributed to irradiation of the growing film by energetic ions and/or neutrals [4,5,19]. In contrast, the widely used hard coatings based on TiCN or Al 2 O 3 grown by CVD on cemented carbide substrates typically exhibit tensile residual stresses, which are mainly due to the difference in thermal expansion coefficients of coating and substrate material [20]. However, CVD TiB 2 coatings have been reported to show compressive residual stresses although their thermal expansion coefficient is larger than that of the substrate [3,21].…”
Section: Introductionmentioning
confidence: 93%
“…In case of PVD TiB 2 , the origin of these stresses can be mainly attributed to irradiation of the growing film by energetic ions and/or neutrals [4,5,19]. In contrast, the widely used hard coatings based on TiCN or Al 2 O 3 grown by CVD on cemented carbide substrates typically exhibit tensile residual stresses, which are mainly due to the difference in thermal expansion coefficients of coating and substrate material [20]. However, CVD TiB 2 coatings have been reported to show compressive residual stresses although their thermal expansion coefficient is larger than that of the substrate [3,21].…”
Section: Introductionmentioning
confidence: 93%
“…The hardness data of the coatings and cementite are collected from the literature [10,17,18]. The temperature-dependent hardness for three coatings (TiN, TiCN and alumina) and the abrasive (cementite) are also collected and presented in Table 2.…”
Section: Development Of Comprehensive Wear Modelsmentioning
confidence: 99%
“…[5,6] In the case of a chemical coating, there are many methodologies, such as vapor deposition, [7][8][9] spraying, [10][11][12] roll-to-roll coating, [13,14] and chemical/electrochemical techniques, to modify and control the surface properties of the substrates for further applications. The concept of coating is also important for the development of biological and tissue engineering fields, for example, surface control of a protein or polymer to control cell adhesion, [15] growth direction, [16,17] or even killing specific bacteria and making a biosensor chip.…”
Section: Introductionmentioning
confidence: 99%