Oxygen is a commonly overlooked element influencing the properties of many metal oxides. By combining several analytical in situ techniques and theoretical calculations, we demonstrate that oxygen plays a vital part in the phase formation and crystallization of Al 2 TiO 5 -based chemical vapor-deposited coatings. Rutherford backscattering spectrometry (RBS) corroborates a polymorphic transformation during crystallization. Subsequent hard X-ray photoelectron spectroscopy (HAXPES) shows that crystallization occurs through a displacive (diffusionless) mechanism. Coupled with theoretical calculations, the crystallization and co-formation of Al 2 TiO 5 , Al 6 Ti 2 O 13 , and Al 16 Ti 5 O 34 are suggested to be driven by the migration of oxygen ions and their corresponding vacancies.