High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

Belmonte, J. Cerdà; Puigcorbé, J.; Arbiol, Jordi; Vilà, A.; Morante, J.R.; Sabaté, N.; Gràcia, I.; Cané, C.

doi:10.1016/j.snb.2005.07.057

Cited by 85 publications

(40 citation statements)

References 33 publications

(35 reference statements)

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“…Heat losses due to convection were neglected thanks to the small membrane size. This simplification creates a deviation in the results of about 5% (Cerda Belmonte et al 2006).…”

Section: Thermal Simulationsmentioning

confidence: 99%

“…If we want to use them in portable applications, these values are still too high. In addition to low power consumption, a uniform temperature distribution is required in the active area to ensure equal sensing properties of the whole surface (Cerda Belmonte et al 2006). Mechanical stability and fast response belong to very important parameters that cannot be neglected.…”

Section: Introductionmentioning

confidence: 99%

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Gallium arsenide suspended microheater for MEMS sensor arrays

et al. 2007

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This work describes the design, simulation, fabrication and characterization of a TiN/Pt microheater prepared on a GaAs micromechanical structure as a prospective device for micro-electro-mechanical system (MEMS) sensor arrays. Electro-thermal simulation was employed to verify the properties of the designed microstructure, which confirmed achievement of the operating temperatures in the range from 470 to 600 K with a heating power less than 25 mW. The average temperature gradient in the active area does not exceed 0.6 K/lm. Fabrication of GaAs suspended membranes was demonstrated, realized in two steps by combination of surface and bulk micromachining. Development and characterization of a microheater on a GaAs membrane is described. The mechanical stability of the heated multilayer membrane structure was tested and satisfactory mechanical stability of the hotplate was confirmed. The power consumption at an operating temperature of approximately 550 K is about 30 mW which is in good agreement with the value of about 22 mW obtained from electro-thermal simulation. The achieved thermal resistance value is 8.43 K/mW.

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“…Heat losses due to convection were neglected thanks to the small membrane size. This simplification creates a deviation in the results of about 5% (Cerda Belmonte et al 2006).…”

Section: Thermal Simulationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Gallium arsenide suspended microheater for MEMS sensor arrays

et al. 2007

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“…Platinum can be used at over 500°C and resist oxidation [18]. Most studies have investigated the fabrication and degradation of microheaters based on platinum [19][20], platinum titanium (Pt-Ti) [21][22], platinum-tantalum (Pt-Ta) [23][24], titanium nitride (TiN) [18], or molybdenum (Mo) [12], etc. Table 1 also shows the microheaters that are built on glass and silicon substrates [25][26][27][28][29].…”

Section: Introductionmentioning

confidence: 99%

Multilayer microheater based on glass substrate using MEMS technology

Chang

Hsihe

2016

Microelectronic Engineering

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“…Most semiconductor gas sensors operate at temperature of 100 ∼ 500 • C to achieve good sensitivity and fast response character, [1][2][3][4] therefore, micro-hotplate is widely used in micro gas sensors due to its outstanding advantages of low power consumption, fast thermal response time and easy to be integrated as sensor array. [5][6][7] By integrating MHP gas sensor array with IC on one chip for signal processing and temperature compensation, intelligent gas sensors can be achieved, thus, CMOS-compatible MHP gas sensors are of great interest.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a CMOS-compatible MHP gas sensor

et al. 2014

AIP Advances

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A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CMOS processes, the membrane is released by front-side bulk silicon etching, and excellent adiabatic performance of the sensor is obtained. Pt/Ti electrode films are prepared on the MHP before the coating of the SnO2 film, which are promising to present better contact stability compared with Al electrodes. Measurements show that at room temperature in atmosphere, the device has a low power consumption of ∼19 mW and a rapid thermal response of 8 ms for heating up to 300 °C. The tungsten heater exhibits good high temperature stability with a slight fluctuation (<0.3%) in the resistance at an operation temperature of 300 °C under constant heating mode for 336 h, and a satisfactory temperature coefficient of resistance of about 1.9‰/°C.

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High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

Cited by 85 publications

References 33 publications

Gallium arsenide suspended microheater for MEMS sensor arrays

Gallium arsenide suspended microheater for MEMS sensor arrays

Multilayer microheater based on glass substrate using MEMS technology

Design and fabrication of a CMOS-compatible MHP gas sensor

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