High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

Miao

et al. 2015

J. R. Soc. Interface.

125

127

Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow 'vision' and object localization with a success unmatched by human- , respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles.

Section: Sensor Designmentioning

confidence: 99%

Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena

Miao

et al. 2015

J. R. Soc. Interface.

125

127

“…Despite of the utility and ubiquity of the lateral-line in fish, this sensory organ has no artificial analogue in the modern underwater vehicle sensing technology and could largely benefit the underwater vehicle control and maneuvering. Ultrasensitive and highly accurate flow sensing abilities of the natural hair cells have inspired researchers to develop biomimetic MEMS hair cell sensors [6][7][8][9][10][11][12][13]. Most researchers in the past developed bioinspired pressure sensor arrays that mimic the lateral-line sensing [7][8][9][10]12].…”

Section: Bioinspirationmentioning

confidence: 99%

Smart skin of self-powered hair cell flow sensors for sensing hydrodynamic flow phenomena

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Kanhere

et al. 2015

In nature, there exist numerous and diverse, highly sensitive and well-evolved biological hair cell sensors which work on the principles of mechanotransduction, serving various sensing needs. This work presents a flexible biomimetic smart skin of self-powered piezoelectric hair cell flow sensors capable of sensing underwater flow phenomena. We developed a 2D array of 20 MEMS flow sensors arranged in a 4×5 pattern spanning a foot-print of 30mm×40mm. Experimental results demonstrate the ability of individual sensors to detect flow velocities as low as 8.24µm/s. The array is capable of determining the location, and distance of an underwater stimulus with an error below 1%.

“…The piezoelectric pressure sensor that is employed to determine the fin flapping parameters consists of a 2μm thick silicon device layer, 0.5μm SiO2 layer and 3μm thick PZT (0.52/0.48) that forms the sensing membrane [7][8][9][10]. A schematic of the proposed PZT MEMS pressure sensor is shown in figure 2b.…”

Section: Sensors Fabricationmentioning

confidence: 99%

Biomimetic locomotion for a robotic stingray using MEMS sensors

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Cloitre

et al. 2015

In this paper, we present the design, fabrication and experimental results of two types of MEMS sensors for manoeuvring and control of a robotic stingray. The first sensor is a piezoresistive liquid crystal polymer haircell flow sensor which is employed to determine the velocity of propagation of the stingray. The second sensor is a Pb(Zr 0.52 Ti 0.48 )O 3 piezoelectric micro-diaphragm pressure sensor which measures various flapping profiles of the stingray's fins which are keys parameters to control the robot locomotion. The piezoelectric sensors show an excellent performance in tracking the trajectory of the fins of the stingray. Although a robotic stingray is used as a platform to emphasize the role of the MEMS sensors, the applications can be extended to most underwater robotic vehicles (URVs).