1994
DOI: 10.1111/j.1151-2916.1994.tb04607.x
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High‐Temperature Active Oxidation and Active‐to‐Passive Transition of Chemically Vapor‐Deposited Silicon Nitride in N2–O2 and Ar–O2 Atmospheres

Abstract: The oxidation behavior of chemically vapor-deposited silicon nitride in N,-0, and Ar-0, atmospheres was studied using a thermogravimetric technique at temperatures 1823 to 1923 K. Active oxidation was observed at low oxygen partial pressures. The active oxidation rates increased with increasing oxygen partial pressure (Po) up to a certain Pol, and then passive oxidation occurred. The transition oxygen partial pressures from active to passive oxidation were determined. The rate-controlling step for the active o… Show more

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Cited by 24 publications
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“…3 Ogbuji, [4][5][6] Spear et al 7 and Du 8 have worked on the Si 3 N 4 oxidation, often in the passive domain, and some have established the possible existence of an intermediate oxynitride layer between Si 3 N 4 and SiO 2 . Vaughn and Maahs, 9 Sheehan, 10 Kim and Moorhead 11 and Narushima et al 12 have studied the transition between active oxidation occurring at high oxygen potentials and passive oxidation. Narushima et al 12 studied the oxidation of Si 3 N 4 prepared by chemical vapour deposition.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…3 Ogbuji, [4][5][6] Spear et al 7 and Du 8 have worked on the Si 3 N 4 oxidation, often in the passive domain, and some have established the possible existence of an intermediate oxynitride layer between Si 3 N 4 and SiO 2 . Vaughn and Maahs, 9 Sheehan, 10 Kim and Moorhead 11 and Narushima et al 12 have studied the transition between active oxidation occurring at high oxygen potentials and passive oxidation. Narushima et al 12 studied the oxidation of Si 3 N 4 prepared by chemical vapour deposition.…”
Section: Introductionmentioning
confidence: 99%
“…Vaughn and Maahs, 9 Sheehan, 10 Kim and Moorhead 11 and Narushima et al 12 have studied the transition between active oxidation occurring at high oxygen potentials and passive oxidation. Narushima et al 12 studied the oxidation of Si 3 N 4 prepared by chemical vapour deposition. Si 3 N 4 ceramic matrix composites reinforced by carbon fibres (C f /Si 3 N 4 ) have the potential to provide combinations of properties at high temperature, e.g.…”
Section: Introductionmentioning
confidence: 99%