The a-and c-axis-oriented YBa Z Cu 3 0 7 _ y thin films were prepared by rf magnetron sputtering technique. The characterization of the thin films was carried out by inductively coupled plasma atomic emission spectroscopy, x-ray diffraction, and scanning Auger profile techniques. The Te. To' (H), J e (H), and HC 2 -T(near Tc) were measured by the standard de four-probe method. It was found that very strong anisotropy of this material was manifested in its superconducting properties, especially for c-axis-oriented thin films. It was also found that Ie depends very strongly upon stoichiometric composition 123, preferential orientation of the film, and the characteristic of the film-substrate interfaceo