High T c superconducting films grown by magnetron and laser-beam technique

Golovashkin, A. I.; Ekimov, E. V.; Krasnosvobodtsev, S. I.; Martovitsky, V. P.; Pechen, E.V.

doi:10.1016/0921-4534(89)91224-0

Cited by 20 publications

(2 citation statements)

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“…Several methods have been applied to reduce the numbers of droplets and particles, for example PLD in off-axis geometry [6], placing the substrate in a tube heater oriented perpendicular to the target surface, and PLD with filtration of the ablation plasma with a velocity filter [7]. Another method uses the crossed-flux technique [8,9], with two laser-induced molecular streams colliding and forming a new stream directed onto the substrate which is placed in the shadow area of the two original molecular streams. Compared with other methods, this process has some advantages.…”

Section: Introductionmentioning

confidence: 99%

Preparation of smooth and films by two-beam excimer laser deposition

Schauer

Weber

Hafner

et al. 1998

Supercond. Sci. Technol.

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A laser deposition arrangement for the preparation of smooth and films is presented. An excimer laser beam is split by a knife-edge prism into two beams, which are focused onto two rotating targets oriented perpendicular to each other. The two laser-induced molecular streams collide and form a new stream containing mainly light molecules and almost no droplets. The molecules from this stream deposit on a substrate that is placed in the shadow of the original molecular streams. The use of copper-poor targets prevented the occurrence of precipitates.

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Section: Introductionmentioning

confidence: 99%

Preparation of smooth and films by two-beam excimer laser deposition

Schauer

Weber

Hafner

et al. 1998

Supercond. Sci. Technol.

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“…In order to prevent direct impact of massive clusters and droplets ejected from the targets onto the substrate the two-beam technique was used [6]. Two synchronized Nd-YAG lasers (1.06 pm wavelength, 10 ns pulse duration, 0.1 J pulse energy, 50 Hz repetition rate) are oriented…”

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confidence: 99%

Anomalies of the photo‐response and thermal boundary resistance of a YBaCuO/YSZ structure

et al. 1993

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The aim of this work is to understand the role of the thermal processes and other physical properties of HTSC bolometric structures in creating the photoresponse. Samples and techniqueThe YBaCuO film was grown by the laser ablation technique. In order to prevent direct impact of massive clusters and droplets ejected from the targets onto the substrate the two-beam technique was used [6]. Two synchronized Nd-YAG lasers (1.06 pm wavelength, 10 ns pulse duration, 0.1 J pulse energy, 50 Hz repetition rate) are oriented

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Two-beam laser deposition process for Y1Ba2Cu3O7−x films on silicon

Pechen

Krasnosvobodtsev

Kessler

et al. 1992

Phys. Stat. Sol. (a)

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Two synchronized Nd–YAG lasers are used for ablation of solid targets in the two‐beam laser deposition technique. Surface morphology and structure of YBaCuO films are successfully improved by application of this method. Droplets on the film surface are avoided, which is very important for the growth of thin buffer layers. ZrO2 buffer layers have been prepared on Si(100) substrates by this technique within two regimes, ablation of metallic zirconium in oxygen atmosphere as well as under vacuum conditions and afterwards in oxygen atmosphere as one‐step and two‐step process, respectively. Pretreatment of the silicon surface before the deposition process is not necessary. c‐axis oriented and textured superconducting Y1Ba2Cu3O7−x (YBCO) films as determined by θ–2θ X‐ray diffraction and rocking curves are grown on the ZrO2 buffer layers. A zero resistance superconducting transition temperature of 88.5 K is measured. The interdiffusion between silicon and the YBCO material is strongly suppressed by a two‐step in‐situ deposition technique of the ZrO2 buffer layer of only 20 nm.

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High T c superconducting films grown by magnetron and laser-beam technique

Cited by 20 publications

References 0 publications

Preparation of smooth and films by two-beam excimer laser deposition

Preparation of smooth and films by two-beam excimer laser deposition

Anomalies of the photo‐response and thermal boundary resistance of a YBaCuO/YSZ structure

Two-beam laser deposition process for Y1Ba2Cu3O7−x films on silicon

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