2007
DOI: 10.1364/oe.15.000660
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High-speed optical modulation based on carrier depletion in a silicon waveguide

Abstract: We present a high-speed and highly scalable silicon optical modulator based on the free carrier plasma dispersion effect. The fast refractive index modulation of the device is due to electric-field-induced carrier depletion in a Silicon-on-Insulator waveguide containing a reverse biased pn junction. To achieve high-speed performance, a travelling-wave design is used to allow co-propagation of electrical and optical signals along the waveguide. We demonstrate high-frequency modulator optical response with 3 dB … Show more

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Cited by 585 publications
(285 citation statements)
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“…In particular, the rapidly growing field of silicon photonics will enable the integration of major optoelectronic components such as mode-locked lasers [27,122,123], high-speed modulators [124][125][126][127], and Si/Ge photodiodes [128,129] His research interests include classical and quantum noise in electronic and optical devices, femtosecond lasers and their applications in frequency metrology, precision timing distribution, high-speed signal processing, and attosecond science.…”
Section: Discussionmentioning
confidence: 99%
“…In particular, the rapidly growing field of silicon photonics will enable the integration of major optoelectronic components such as mode-locked lasers [27,122,123], high-speed modulators [124][125][126][127], and Si/Ge photodiodes [128,129] His research interests include classical and quantum noise in electronic and optical devices, femtosecond lasers and their applications in frequency metrology, precision timing distribution, high-speed signal processing, and attosecond science.…”
Section: Discussionmentioning
confidence: 99%
“…One of the basic modulators uses Mach-Zehnder interferometer (MZI) structure composed of two Si rib WGs embedding pn junction [62,63]. Because of the crystal symmetry of Si, there is no first-order electro-optic (EO) effect (Pockels effect), while the change in the refractive index in Si can be obtained with the free-carrier plasma effect induced by the high density of carriers [64].…”
Section: Low-power Optical Modulatorsmentioning
confidence: 99%
“…This has fueled significant research and development work in this area in the past few years. [1][2][3][4][5][6][7][8][9][10][11] Many silicon-based active photonics components, such as high-speed modulators and Ge photodetectors [4][5][6][7][8][9][10] have been demonstrated on submicron waveguides. However, submicron SOI waveguides still suffer from high fiber coupling loss, high polarization dependent loss, and large waveguide birefringence and phase noise.…”
mentioning
confidence: 99%