High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup

Knell, Holger; Lehmann, Peter

doi:10.1117/12.2020121

Cited by 3 publications

(1 citation statement)

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“…In this contribution we propose a novel approach to sub-aperture stitching. A line scanning interferometer [16,17] is used to measure ring shaped sub-apertures on a continuously rotating specimen. The interferometer consists of a microscope with a line scan camera and a Michelson setup which utilizes optical path length modulation (OPLM) in the reference arm to generate interference signals from which the surface topography can be obtained.…”

Section: Introductionmentioning

confidence: 99%

Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation

Knell¹,

Laubach²,

Ehret³

et al. 2014

Opt. Express

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We present a fast approach to the continuous measurement of rotational symmetric optical surfaces. This approach is based on a line scanning interferometer with sinusoidal modulation of the optical path length. The specimen is positioned with respect to the sensor and both are moved during measurement by use of a five axes system comprising a high precision rotational table. The calibration of both the line sensor as well as the scanning and positioning system is discussed. As proof of principle of the measurement and stitching concept results of a scan of a rotational symmetric sinusoidal structure and a spherical lens with a moderate slope are shown.

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Section: Introductionmentioning

confidence: 99%

Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation

Knell¹,

Laubach²,

Ehret³

et al. 2014

Opt. Express

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A Novel Form Measurement System for Precision Components Using Interferometric Sub-aperture Stitching

et al. 2014

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A new form measurement system based on subaperture stitching with a line-scanning interferometer

Laubach

Ehret

Riebeling

et al. 2016

Advanced Optical Technologies

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A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system, ring-shaped subapertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r>50 mm). The individual subapertures are stitched together to yield the full 3D topography. Because the rotation of the specimen by more than 360° has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. Reproducibility measurements for one ring scan performed with the system show a standard deviation of 14 nm. The system can be set up at a moderate price as off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed.

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High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup

Cited by 3 publications

References 0 publications

Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation

Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation

A Novel Form Measurement System for Precision Components Using Interferometric Sub-aperture Stitching

A new form measurement system based on subaperture stitching with a line-scanning interferometer

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