We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam's spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., oneeightieth (1∕80) of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio, which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible. The search for new optical methods to measure thickness in the range of a few nanometers or even hundreds of picometers is a topic of great interest. This is fuelled not only by the desire to reach the limit of resolution on the use of light in the nanoworld but also to develop new methods that can complement and/or substitute some well-established techniques, such as x-ray spectroscopy, atomic force microscopy, and ellipsometry [1][2][3]. Moreover, the continuous shrinking of all kinds of optical and electronic devices and the explosive growth of the exploration of the inner working of cells and molecular bio machines demand detection techniques that apart from being highly sensitive, must also be noninvasive, faster, and easy to implement in different scenarios. These requirements can be met by photonics technologies. Most of the time, high-resolution optical metrology is closely related to the evaluation of the phase of an electromagnetic field. In general, phases cannot be readily obtained and the desired information must be extracted indirectly by some other methods. The most widely used of these methods is interferometry. By looking at the intensity produced at the output port of an interferometer, the relative phase can be measured and consequently, the relative thickness of a layer. Hugely small global phase differences between two independent beams up to ∼1 × 10 −7 rad can be detected [4,5]. The detection of small structures, such as a step [6], is more cumbersome since the reflected beam contains a spatially varying phase instead of a global phase which should be resolved.A major problem in interferometry is the presence of uncontrollable disturbances that can also introduce phase differences. This is especially critical when tiny phase changes are being measured. A way to circumvent this problem is by using a common path interferometer (CPI) where an unperturbed part of the beam acts as a reference beam and travels the same path as the signal beam [7,8]. A CPI has been used extensively in quantitative phase measurements since Dyson's seminal paper in 1953 [9]. A CPI scheme at quadrature condition (i.e., the phase difference between the reference and signal beams is centered around π∕2) is very sensitive to minute changes in the phase of the signal beam [10][11][12]. At this condition, a CPI provides a linear relationship between the observed intensity modulation and the change in ...