“…In addition several structural enhancements and modifications have been incorporated onto the chip; these include: (1) integration of the bias tee on chip, (2) integration of a 50-Ω termination resistor, (3) fabrication of the complete waveguide stack from semi-insulating materials, (4) achieving efficient coupling to short, low-capacitance photodiodes, (5) utilization of thin depleted absorbing layers to minimize the carrier transit component of the bandwidth, and (6) air bridge connections to coplanar contact pads. Photodiodes of this type have achieved 100-GHz bandwidth, 53-GHz bandwidth-efficiency product, polarization dependent loss of 0.9 dB, and ± 2 μm vertical and horizontal alignment tolerances [10]. The 1-dB saturation point of the RF output power has reached -8 dBm at 100 GHz.…”