High speed imaging of drilling process of thin silicon substrates with double-pulsed femtosecond laser

Yokotani, Atushi; Fukumoto, Hideo; Kanamitsu, Yasushi; Nagatomo, Satoshi; Maezono, Yoshinari; Katto, Masahito

doi:10.1117/12.739123

XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers 2006

DOI: 10.1117/12.739123

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High speed imaging of drilling process of thin silicon substrates with double-pulsed femtosecond laser

Atushi Yokotani

Hideo Fukumoto

Yasushi Kanamitsu

et al.

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High speed imaging of drilling process of thin silicon substrates with double-pulsed femtosecond laser

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