High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
Do-Hyeon Choi,
In-Jun Yang,
Min-Ki Hong
et al.
Abstract:This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the d axis and q axis, but they are at a disadvantage in terms of reducing cogging torque while tapering the rotor and stator to reduce torque ripple. In addition, the existing single tapering can push the permanent ma… Show more
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