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1992
DOI: 10.1109/68.163764
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High-speed chip-to-chip optical interconnect

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Cited by 7 publications
(3 citation statements)
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“…In the case of power monitoring on integrated optical components (where only part of the channels need to be terminated) the use of such costly substrates can not be justified and a Si wafer board based hybrid integration approach is preferable. For this purpose, the definition of an out-of-plane coupling structure into the polymeric layer stack is required for which several methods have been reported, including laser ablation [15]- [16], microtoming [17], embossing [18], focused ion beam etching [19], sawing [20], and injection molding [21]. Because of the poor reproducibility or requirement of complicated equipment of these techniques, we have developed a novel integration concept [22] based on a micromachined Si submount with an integrated mirror (Fig.…”
Section: Pd Integration Conceptmentioning
confidence: 99%
“…In the case of power monitoring on integrated optical components (where only part of the channels need to be terminated) the use of such costly substrates can not be justified and a Si wafer board based hybrid integration approach is preferable. For this purpose, the definition of an out-of-plane coupling structure into the polymeric layer stack is required for which several methods have been reported, including laser ablation [15]- [16], microtoming [17], embossing [18], focused ion beam etching [19], sawing [20], and injection molding [21]. Because of the poor reproducibility or requirement of complicated equipment of these techniques, we have developed a novel integration concept [22] based on a micromachined Si submount with an integrated mirror (Fig.…”
Section: Pd Integration Conceptmentioning
confidence: 99%
“…Concepts for optical interconnect systems have long been present [3] . Barriers to industrial implementation center on the balance between performance improvements and reliability over existing metal interconnect systems.…”
Section: Introductionmentioning
confidence: 99%
“…The solution for further enhancement of integrated circuits is sought in photonics, which is utilizing photons instead of electrons for data transfer. Chip-to-chip optical instead of electronic communication will not only completely solve the problems concerning the propagation delay, signal interference and heat dissipation in the metal wires, but also provide large information bandwidths [2][3][4][5]. The earliest research on optical circuits has been carried out during 1970s and the vision of a chip containing integrated optical components was proposed, as shown in Fig.…”
Section: Introductionmentioning
confidence: 99%